Space-resolved velocity and flux distributions of sputtered Ti atoms in a planar circular magnetron discharge

Plasma Sources Science and Technology

Volumn 20, Issue 4, 2011, Pages

  Vitelaru, C ^a,c   De Poucques, L ^b   Minea, T M ^a   Popa, G ^c  

^a UNIVERSITÉ PARIS SUD   (France)

^b INSTITUT JEAN LAMOUR   (France)

^c ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR DISTRIBUTION; ANGULAR VELOCITY; ATOMS; DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; GROUND STATE; LASER BEAMS; MAGNETRONS; VELOCITY DISTRIBUTION;

ANGULAR DEPENDENCE; CIRCULAR MAGNETRON; ENERGETIC PARTICLES; ENERGY DISTRIBUTION FUNCTIONS; FLUX DISTRIBUTIONS; NORMAL DIRECTION; SPACE VARIATION; SPUTTERED ATOMS;

ATOM LASERS;

EID: 80051646001     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/20/4/045020     Document Type: Article

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