Integration of piezoelectric aluminum nitride and ultrananocrystalline diamond films for implantable biomedical microelectromechanical devices

Applied Physics Letters

Volumn 102, Issue 10, 2013, Pages

  Zalazar, M ^a,b   Gurman, P ^a   Park, J ^a   Kim, D ^c   Hong, S ^a,c   Stan, L ^a   Divan, R ^a   Czaplewski, D ^a   Auciello, O ^a,d  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b UNIVERSIDAD NACIONAL DEL LITORAL   (Argentina)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^d UNIVERSITY OF TEXAS AT DALLAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN FILMS; ALUMINUM NITRIDE (ALN); BORON-DOPED; ELECTRICALLY CONDUCTIVE; IMPLANTABLE DRUG DELIVERY; RMS ROUGHNESS; ULTRA-NANOCRYSTALLINE DIAMOND FILMS; ULTRANANOCRYSTALLINE DIAMONDS;

CONDUCTIVE FILMS; DRUG DELIVERY; ELECTROMECHANICAL DEVICES; GRAIN BOUNDARIES; MEMS; PIEZOELECTRICITY;

ALUMINUM NITRIDE;

EID: 84875128996     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4792238     Document Type: Article

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