Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography

Diamond and Related Materials

Volumn 17, Issue 4-5, 2008, Pages 804-808

  Benedic F ^a   Assouar, M B ^b   Kirsch, P ^b   Moneger D ^a   Brinza, O ^a   Elmazria, O ^b   Alnot, P ^b   Gicquel, A ^a  

^a UNIVERSITÉ PARIS 13   (France)

^b INSTITUT JEAN LAMOUR   (France)

Author keywords

Aluminum nitride; High frequency electronics; Nanocrystalline diamond; Surface acoustic wave devices

Indexed keywords

ALUMINUM COMPOUNDS; ELECTRON BEAM LITHOGRAPHY; NANOCRYSTALLINE MATERIALS; SYNTHETIC DIAMONDS;

ALUMINUM NITRIDE; HIGH FREQUENCY ELECTRONICS; NANOCRYSTALLINE DIAMONDS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 42949136578     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.10.015     Document Type: Article

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