High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 50, Issue 6, 2003, Pages 710-715

  Elmazria, Omar ^a   Mortet, Vincent ^b   El Hakiki, Mohamed ^a   Nesladek, Milos ^b   Alnot, Patrick ^a  

^a UNIVERSITÉ DE LORRAINE   (France)

^b HASSELT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; COMPUTER SIMULATION; CRYSTAL ORIENTATION; DIAMONDS; ETCHING; GREEN'S FUNCTION; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; SILICON;

ELECTROMECHANICAL COUPLINGS;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0038720487     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2003.1209558     Document Type: Article

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