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Applied Physics A: Materials Science and Processing

Volumn 69, Issue 7, 1999, Pages

Smooth and oriented AlN thin films deposited by laser ablation and their application for SAW devices

(4) Meinschien, J a Behme, G b Falk, F a Stafast, H a

a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY (Germany)

b PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4944252842 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390051505 Document Type: Article

Times cited : (26)

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