Preparation of AlN and LiNbO3 thin films on diamond substrates by sputtering method

Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 408-412

  Ishihara, M ^a   Nakamura, T ^a   Kokai, F ^a   Koga, Y ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Diamond; Preferential orientation; Surface acoustic wave device; Surface roughness

Indexed keywords

ACOUSTIC WAVES; BANDWIDTH; DIAMONDS; ELASTICITY; LITHIUM; PIEZOELECTRIC DEVICES; POLYCRYSTALLINE MATERIALS; SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS; TRANSDUCERS; VELOCITY; WAVE PROPAGATION; X RAY DIFFRACTION;

ACOUSTIC PROPAGATION;

THIN FILMS;

DIAMOND;

EID: 0036508299     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00657-4     Document Type: Article

References (12)