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Materials Letters

Volumn 66, Issue 1, 2012, Pages 339-342

Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators

(7) Rodriguez Madrid J G a Iriarte, G F a Araujo, D b Villar, M P b Williams, O A c Muller Sebert W c Calle, F a

a UNIVERSIDAD POLITÉCNICA DE MADRID (Spain)

b UNIVERSITY OF CÁDIZ (Spain)

c FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF (Germany)

Author keywords

AlN sputtering; Diamond; High frequency; SAW resonators

Indexed keywords

ALN; ALN FILMS; ALN SPUTTERING; C-AXIS ORIENTATIONS; DEVICE PERFORMANCE; DIAMOND SUBSTRATES; FILM MATERIALS; HIGH FREQUENCY; HIGH-FREQUENCY SURFACES; KEY PARAMETERS; MICROCRYSTALLINE DIAMOND; ONE-PORT RESONATORS; PIEZOELECTRIC FILM; SAW RESONATORS; THIN LAYERS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; DIAMOND DEPOSITS; DIAMONDS; RESONATORS;

ACOUSTIC RESONATORS;

EID: 80053357035 PISSN: 0167577X EISSN: None Source Type: Journal
DOI: 10.1016/j.matlet.2011.09.003 Document Type: Article

Times cited : (58)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.