Growth of high quality AlN thin films on diamond using TiN/Ti buffer layer

Diamond and Related Materials

Volumn 15, Issue 2-3, 2006, Pages 404-409

  Chou, Cheng Hsien ^a   Lin, Yung Chen ^a   Huang, Jin Hua ^a   Tai, Nyan Hwa ^a   Lin, I Nan ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b TAMKANG UNIVERSITY   (Taiwan)

Author keywords

AIN; Buffer layer; MPECVD; RF sputtering; UNCD

Indexed keywords

ADHESION; ALUMINUM NITRIDE; DIAMOND FILMS; TEXTURES;

BUFFER LAYER; MPECVD; RF-SPUTTERING;

THIN FILMS;

EID: 33644917133     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.07.032     Document Type: Article

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