W-shaped cantilevers for scanning force microscopy

IEEE Sensors Journal

Volumn 13, Issue 4, 2013, Pages 1340-1346

  Le Rouzic, Julian ^a   Vairac, Pascal ^b   Cavallier, Bruno ^b   Cretin, Bernard ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b CNRS   (France)

Author keywords

Atomic force microscopy; micromechanical devices; sensor phenomena and characterization

Indexed keywords

CONTACT STIFFNESS; FINITE ELEMENT SOFTWARE; HIGH SPATIAL RESOLUTION; MECHANICAL CHARACTERIZATIONS; MICRODEFORMATIONS; MICROMECHANICAL DEVICE; TANGENTIAL FORCE; TIP TILT;

ATOMIC FORCE MICROSCOPY; NANOCANTILEVERS;

SCANNING TUNNELING MICROSCOPY;

EID: 84874620395     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2012.2232784     Document Type: Article

References (33)

1. X. Li and B. Bhushan, "A review of nanoindentation continuous stiffness measurement technique and its applications, " Mater. Charact., vol. 48, no. 1, pp. 11-36, Feb. 2002 (Pubitemid 34811629)
2. G. Binnig, and C. F. Quate, "Atomic force microscope, " Phys. Rev. Lett., vol. 56, no. 9, pp. 930-933, 1986
3. B. Capella and G. Dietler, "Force-distance curves by atomic force microscopy, " Surf. Sci. Rep., vol. 34, nos. 1-3, pp. 1-104, 1999
4. U. Rabe and W. Arnold, "Acoustic microscopy by atomic force microscopy, " Appl. Phys. Lett. vol. 64, no. 12, pp. 1493-1495, 1994
5. R. Arinero, G. Leveque, P. Girard, and J. Y. Ferrandis, "Image processing for resonance frequency mapping in atomic force modulation microscopy, " Rev. Sci. Instrum., vol. 78, no. 2, pp. 023703-023709, 2007
6. E. Dupas, G. Gremaud, A. Kulik, and J. L. Loubet, "High-frequency mechanical spectroscopy with an atomic force microscope, " Rev. Sci. Instrum., vol. 72, no. 10, pp. 3891-3897, 2001 (Pubitemid 33607385)
7. J. E. Sader, "Susceptibility of atomic force microscope cantilevers to lateral forces, " Rev. Sci. Instrum., vol. 74, no. 4, pp. 2438-2443, Apr. 2003
8. J. E. Sader and R. C. Sader, "Susceptibility of atomic force microscope cantilevers to lateral forces: Experimental verification, " Appl. Phys. Lett., vol. 83, no. 15, pp. 3195-3197, 2003
9. J. A. Turner and J. S. Wiehn, "Sensitivity of flexural and torsional vibration modes of atomic force microscope cantilevers to surface stiffness variations, " Nanotechnol., vol. 12, no. 3, pp. 322-330, 2001 (Pubitemid 32962327)
10. W. J. Chang, "Sensitivity of vibration modes of atomic force microscope cantilevers in continuous surface contact, " Nanotechnol., vol. 13, no. 4, pp. 510-514, 2002
11. H. L. Lee, W. J. Chang, and Y. C. Yang, "Flexural sensitivity of a V-shaped cantilever of an atomic force microscope, " Mater. Chem. Phys., vol. 92, nos. 2-3, pp. 438-442, Aug. 2005
12. K. Shen, D. C. Hurley, and J. A. Turner, "Dynamic behavior of daggershaped cantilevers for atomic force microscopy, " Nanotechnol., vol. 15, no. 11, pp. 1582-1589, 2004
13. T. Akiyama, U. Staufer, and N. F. De Rooij, "Self-sensing and selfactuating probe based on quartz tuning fork combined with microfabricated cantilever for dynamic mode atomic force microscopy, " Appl. Surf. Sci., vol. 210, nos. 1-2, pp. 18-21, 2003
14. T. Akiyama, U. Staufer, N. F. De Rooij, P. Frederix, and A. Engel, "Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy, " Rev. Sci. Instrum., vol. 74, no. 1, pp. 112-117, Jan. 2003
15. O. Sahin, S. Magonov, C. Su, C. F. Quate, and O. Solgaard, "An atomic force microscope tip designed to measure time-varying nanomechanical forces, " Nature Nanotechnol., vol. 2, pp. 507-514, Jul. 2007 (Pubitemid 47220072)
16. N. Mullin, C. Vasilev, J. D. Tucker, C. N. Hunter, C. H. M. Weber, and J. K. Hobbs, "Torsional tapping atomic force microscopy using T-shaped cantilevers, " Appl. Phys. Lett., vol. 94, no. 17, pp. 173109-173112, 2009
17. Y. Liu, K. M. Leung, H. Y. Nie, W. L. Lau, and J. Yang, "A new AFM nanotribology method using a t-shape cantilever, " Tribol. Lett., vol. 41, pp. 313-318, Sep. 2011
18. G. J. Germann, S. R. Cohen, G. Neubauer, G. M. Mcclelland, H. Seki, and D. Coulman, "Atomic-scale friction of a diamond tip on diamond (100) surface and (111) surface, " J. Appl. Phys., vol. 73, no. 1, pp. 163-167, 1993
19. S. A. Edwards, W. A. Ducker, and J. E. Sader, "Influence of atomic force microscope cantilever tilt and induced torque on force measurements, " J. Appl. Phys., vol. 103, no. 6, pp. 064513-064519, 2008
20. F. Wang, "Comment on Influence of atomic force microscope cantilever tilt and induced torque on force measurements, " J. Appl. Phys., vol. 106, no. 9, pp. 096103-1-096103-3, Nov. 2009
21. B. Cretin and F. Sthal, "Scanning microdeformation microscopy, " Appl. Phys. Lett., vol. 62, no. 8, pp. 829-831, Feb. 1993
22. P. Vairac and B. Cretin, "Scanning microdeformation microscopy in reflection mode, " Appl. Phys. Lett., vol. 68, no. 4, pp. 461-463, 1996 (Pubitemid 126684402)
23. P. Vairac and B. Cretin, "New structures for heterodyne interferometric probes using double-pass, " Opt. Commun., vol. 132, nos. 1-2, pp. 19-23, Nov. 1996 (Pubitemid 126390745)
24. J. Le Rouzic, P. Delobelle, P. Vairac, and B. Cretin, "Comparison of three different scales techniques for the dynamic mechanical characterization of two polymers (PDMS and SU8), " Eur. Phys. J. Appl. Phys., vol. 48, no. 1, pp. 11201-11212, Oct. 2009
25. P. Vairac and B. Cretin, "Electromechanical resonator in scanning microdeformation microscopy: Theory and experiment, " Surf. Inter. Anal., vol. 27, nos. 5-6, pp. 588-591, May-Jun. 1999
26. J. Le Rouzic, B. Cretin, P. Vairac, and B. Cavallier, "Specific geometries of resonant cantilevers for scanning force microscopy, " in Proc. IEEE Int. Freq. Control Symp. Joint 22nd Eur. Freq. Time Forum., Apr. 2009, pp. 822-825
27. J. Le Rouzic, P. Vairac, B. Cretin, and P. Delobelle, "Sensitivity optimization of the scanning microdeformation microscope and application to mechanical characterization of soft materials, " Rev. Sci. Instrum., vol. 79, no. 3, pp. 033707-1-033707-3, Mar. 2008
28. B. Cavallier, B. Cretin, P. Vairac, and S. Thibaud, "Numerical modeling of the cantilever-tip vibrations in scanning microdeformation microscope, " in Proc. IEEE Ultrason. Symp., Oct. 2007, pp. 805-808
29. D. C. Hurley and J. A. Turner, "Measurement of Poisson's ratio with contact-resonance atomic force microscopy, " J. Appl. Phys., vol. 102, no. 3, pp. 033509-1-033509-8, 2007
30. J. Le Rouzic, P. Delobelle, B. Cretin, P. Vairac, and F. Amiot, "Simultaneous measurement of Young's modulus and Poisson's ratio at microscale with two-modes scanning microdeformation microscopy, " Mat. Lett., vol. 68, no. 1, pp. 370-373, Feb. 2012
31. J. A. Turner, "Non-linear vibrations of a beam with cantilever-Hertzian contact boundary conditions, " J. Sound Vibrat., vol. 275, nos. 1-2, pp. 77-191, Aug. 2004
32. P. Vairac, R. Boucenna, J. Le Rouzic, and B. Cretin, "Scanning microdeformation microscopy: Experimental investigations on non-linear contact spectroscopy, " J. Phys. D, Appl. Phys., vol. 41, no. 15, p. 155503, 2008
33. E. Rigaud and J. Perret-Liaudet, "Experiments and numerical results on non-linear vibrations of an impacting Hertzian contact. Part 1: Harmonic excitation, " J. Sound Vibrat., vol. 265, no. 2, pp. 289-307, Aug. 2003.