Numerical modeling of the cantilever-tip vibrations in scanning microdeformation microscope

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 805-808

  Cavallier, B ^a   Cretin, B ^a   Vairac, P ^a   Thibaud, S ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

Contact modeling; Finite element; Microscopy

Indexed keywords

ACOUSTOOPTICAL EFFECTS; CORUNDUM; DIAMONDS; FINITE ELEMENT METHOD; MICROSCOPES; NONMETALS; OPTICAL PROPERTIES; PIEZOELECTRIC DEVICES; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SILICON; TRANSDUCERS; ULTRASONICS;

CONTACT MODELING; FINITE ELEMENT; IMPLICIT ALGORITHMS; LS-DYNA CODE; MICRO-DEFORMATION; MICROSCOPY; NON-LINEAR FINITE ELEMENT MODELING; NUMERICAL MODELLING; OSCILLATION FREQUENCIES; SCANNING PROBE MICROSCOPES; SILICON CANTILEVERS;

SCANNING;

EID: 48149106498     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.206     Document Type: Conference Paper

References (13)

1. O. Kolosov and K. Yamanaka, "Nonlinear detection of ultrasonic vibrations in an atomic force microscope ", Jpn. J. Appl. Phys., vol. 324, pp. 1095-1097, 1993
2. B. Cretin and F. Sthal, " Scanning Microdeformation Microscopy ", Appl. Phys. Lett., vol. 62, pp. 829-831, 1993.
3. V. B. Elings and P.K. Hansma, " Using force modulation to image surface elasticities with the atomic force microscope", Nanotechnology, vol. 2, pp. 103-106, 1991.
4. U. Rabe and W. Arnold, " Acoustic microscopy by atomic force microscopy ", Appl. Phys. Lett., vol. 64, pp. 1493-1495, 1994.
5. N. A. Burnham, A.J. Kulik, G. Gremaud, P.J. Gallo, F. Ouveley, "Scanning local accelaration Microscopy", J. Vac. Sci. Technol., Vol. B14, 1308, 1996.
6. P. Vairac, and B. Cretin, " Scanning Microdeformation Microdeformation Microscopy in reflection mode", Appl. Phys. Lett., vol. 68, pp. 461-463, 1996.
7. P-M. Mazeran and J-L. Loubet, " Force modulation with a scanning force microscope: an analysis ", Trib. Lett., vol. 3, pp. 125-132, 1997.
8. G. Neubauer, S. R. Cohen, G. M. McClelland, D. Home and C. M. Mate, " Force microscopy with a bi-directional capacitance sensor, Rev. Sci. Instrum., vol. 61, pp. 2296-2307, 1990.
9. T. Itoh, and T. Suga, " Piezoelectric sensor for detecting force gradients in atomic force microscopy ", Jpn. J. Appl. Phys., vol. 33, pp. 334-340, 1994.
10. D. Sarid, Scanning Force Microscopy, Oxford Universty Press, New-York, 1991.
11. C. A. Putman, B. G. de Grooth, N. F. van Hulst and J. Greve, "A detailed analysis of the optical beam deflection technique for use in atomic force microscopy ", J. Appl. Phys., vol. 72, pp. 6-12, 1992.
12. B. Cretin and P. Vairac, "Optical detection for Scanning Microdeformation Microscopy", Appl. Phys. Lett., Vol.71, pp. 2082-2084, 1997.
13. P. Vairac: PhD Thesis, University of Besançon, France, 1996.