Specific geometries of resonant cantilevers for scanning force microscopy

2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum

Volumn , Issue , 2009, Pages 822-825

  Rouzic, Julian Le ^a   Cretin, Bernard ^a   Vairac, Pascal ^a   Cavallier, Bruno ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC SLIDING; FINITE ELEMENT SIMULATIONS; MICRODEFORMATIONS; RESONANT CANTILEVER; SCANNING FORCE MICROSCOPY; STATIC DEFLECTIONS; TORSIONAL VIBRATION;

SCANNING; SCANNING TUNNELING MICROSCOPY;

NANOCANTILEVERS;

EID: 70449515470     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2009.5168301     Document Type: Conference Paper

References (10)

1. V. Scherer, W. Arnold, Friction force microscopy at ultrasonic frequencies In: B. Bhushan (ed.) Micro/nanotribology and its applications. Kluwer Academic, 1997.
2. F. Sthal and B. Cretin, Appl. Phys. Lett. 62 829, 1993.
3. B. Cretin and P. Vairac, Appl. Phys. Lett. 71 2082-4, 1997.
4. P. Vairac and B. Cretin, Opt. Commun. 132 19-23, 1996.
5. U. Rabe and W. Arnold, Appl. Phys. Lett. 64 1493-5, 1994.
6. N. A. Burnham, A. Kulik, G. Gremaud, P. J. Gallo and F. Ouveley, J. Vac. Sci. Technol. B 14 794-9, 1996.
7. O. Kolosov and K. Yamanaka, Jpn. J. Appl. Phys. 32 L1095-L1098, 1993.
8. E Chilla, T. Hesjedal and H. J. Frohlich, Proc. IEEE Ultrasonics Symposium pp. 363-6, 1994.
9. E. Dupas E, G. Gremaud G, A. Kulik and J. L. Loubet, Rev. Sci. Instrum. 72 3891-3897, 2001.
10. J. Le Rouzic, P. Vairac, B. Cretin and P. Delobelle, Rev. Sci. Instrum. 79 033707, 2008.