Electromechanical resonator in scanning microdeformation microscopy: theory and experiment

Surface and Interface Analysis

Volumn 27, Issue 5, 1999, Pages 588-591

  Vairac, P ^a   Cretin, B ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; PROBES; RESONATORS; SILICON; STIFFNESS; ULTRASONICS;

CONTACT STIFFNESS; ELECTROMECHANICAL RESONATOR; SCANNING MICRODEFORMATION MICROSCOPY; ULTRASONIC ATOMIC FORCE MICROSCOPY; VIBRATION SHAPES;

ATOMIC FORCE MICROSCOPY;

EID: 0032645825     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199905/06)27:5/6<588::AID-SIA479>3.0.CO;2-X     Document Type: Article

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