Coefficient of thermal expansion and elastic modulus of thin films

Journal of Applied Physics

Volumn 86, Issue 9, 1999, Pages 4936-4942

  De Lima Jr , M M ^a   Lacerda, R G ^a   Vilcarromero, J ^a   Marques, F C ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000665608     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371463     Document Type: Article

References (64)

1. J. Robertson, Prog. Solid State Chem. 21, 199 (1991).
2. R. W. Hoffman, Physics of Non-Metallic Thin Films (Plenum, New York, 1970), Vol. B-14.
3. P. Wickboldt, S. J. Jones, F. C. Marques, D. Pang, W. A. Turner, A. E. Wetsel, W. Paul, and J. H. Chen, Philos. Mag. B 64, 655 (1991).
4. D. S. Campbell, Mechanical properties of thin films, Handbook of Thin Film Technology (McGraw-Hill, New York, 1970), Chap. 12.
5. F. C. Marques, P. Wickboldt, D. Pang, J. H. Chen, and W. Paul, J. Appl. Phys. 84, 3118 (1998).
6. C. L. Kuo, P. E. Vanier, and J. C. Bilello, J. Appl. Phys. 55, 375 (1984).
7. T. Iwaoka, S. Yokoyama, and Y. Osaka, Jpn. J. Appl. Phys., Part 1 24, 112 (1985).
8. X. Jiang, J. W. Zou, K. Reichelt, and P. Grünberg, J. Appl. Phys. 67, 4729 (1990).
9. X. Jiang, B. Goranchev, K. Schmidt, P. Grünberg, and K. Reichelt, J. Appl. Phys. 67, 6772 (1990).
10. J. P. Harbison, A. J. Williams, and D. V. Lang, J. Appl. Phys. 55, 946 (1984).
11. F. Rossi et al., J. Appl. Phys. 75, 3121 (1994).
12. T. A. Friedmann, J. P. Sullivan, J. A. Knapp, D. R. Tallant, D. M. Follstaedt, D. L. Medlin, and P. B. Mirkarimi, Appl. Phys. Lett. 71, 3820 (1997).
13. R. Bhadra, J. Pearson, P. Okamoto, L. Rehn, and M. Grimsditch, Phys. Rev. B 38, 12656 (1988).
14. P. J. Burnett and G. A. D. Briggs, J. Mater. Sci. 21, 1828 (1986).
15. A. Witvrouw and F. Spaepen, J. Appl. Phys. 74, 7154 (1993).
16. F. Jansen and M. A. Machonkin, J. Vac. Sci. Technol. A 6, 1696 (1988).
17. C. A. Volkert, J. Appl. Phys. 74, 7107 (1993).
18. I. A. Blech and P. Wood, J. Vac. Sci. Technol. A 11, 728 (1993).
19. F. C. Marques, R. G. Lacerda, M. M. de Lima, Jr., and J. Vilcarromero, Phys. Status Solidi B 192, 549 (1995).
20. R. G. Lacerda, M. M. de Lima, Jr., J. Vilcarromero, and F. C. Marques, in Surfaces, Vacuum, and Their Applications, edited by Hernández-Calderón and Asomoza (AIP, New York, 1996), p 315.
21. M. Janda, Thin Solid Films 112, 219 (1984).
22. M. Janda, Thin Solid Films 142, 37 (1986).
23. O. Kraft and W. D. Nix, J. Appl. Phys. 83, 3035 (1998).
24. A. Fujita, T. Suzuki, N. Kataoka, and K. Fukamichi, Phys. Rev. B 50, 6199 (1994).
25. R. G. Lacerda and F. C. Marques, Appl. Phys. Lett. 73, 617 (1998).
26. F. C. Marques and I. Chambouleyron, Proceedings of the 9th European Photovoltaic Solar Energy Conference, edited by W. Palz, G. T. Wrixon, and P. Helm (Kluwer Academic, Dordrecht, 1989), p. 1042.
27. P. I. Rovira and F. Alvarez, Phys. Status Solidi B 192, 535 (1995).
28. J. Vilcarromero, F. C. Marques, and F. L. Freire, J. Appl. Phys. 84, 174 (1998).
29. V. Hoffman, Solid State Technol. 21, 47 (1978).
30. B. A. Movchan and A. V. Demchishin, Fiz. Metal. Metaloved. 28, 653 (1969).
31. J. A. Thornton, J. Vac. Sci. Technol. 11, 666 (1974).
32. J. A. Thornton, J. Vac. Sci. Technol. 12, 830 (1975).
33. R. F. Bunshan, J. Vac. Sci. Technol. 11, 633 (1974).
34. W. A. Brantley, J. Appl. Phys. 44, 534 (1973).
35. R. B. Roberts, J. Phys. D 14, L163 (1981).
36. O. Madelung, M. Schulz, and H. Weiss, Landboldt-Börnestein Numerical data and Functional Relationships in Science and Technology (Springer, Berlin, 1982), Vol. III 17a.
37. Data Supplied by the manufacturer, Corning Glass.
38. Data Supplied by the manufacturer, Precision Glass.
39. M. M. de Lima, Jr., Master degree thesis, Unicamp, Brazil, 1998; R. G. Lacerda, Master degree thesis, Unicamp, 1998.
40. M. M. de Lima, Jr., Master degree thesis, Unicamp, Brazil, 1998; R. G. Lacerda, Master degree thesis, Unicamp, 1998.
41. A. Witvrouw and F. Spaepen, MRS Spring Meeting San Francisco, CA, 1990.
42. P. A. Flinn, D. S. Gardner, and W. D. Nix, IEEE Trans. Electron Devices ED-34, 689 (1987).
43. M. Stutzmann, Appl. Phys. Lett. 47, 21 (1985).
44. G. C. Stoney, Proc. R. Soc. London, Ser. A 32, 172 (1909).
45. R. W. Hoffman, Physics of Thin Films (Academic, New York, 1966), Vol. 3.
46. T. F. Retajczyk, Jr. and A. K. Sinha, Appl. Phys. Lett. 36, 161 (1980).
47. S. Guo and W. Wang, Thin Solid Films 219, 135 (1992).
48. T. F. Retajczyk, Jr. and A. K. Sinha, Thin Solid Films 70, 241 (1980).
49. S. P. Murarka and T. F. Retajczyk, Jr., J. Appl. Phys. 54, 2069 (1983).
50. A. L. Geiger and P. Welch, J. Mater. Sci. 32, 2611 (1997).
51. J. B. Shelby, J. Non-Cryst. Solids 34, 111 (1979).
52. K. Lu and M. L. Sui, Acta Metall. Mater. 43, 3325 (1995).
53. H. Y. Tong, J. T. Wang, B. Z. Ding, H. G. Jiang, and K. Lu, J. Non-Cryst. Solids 150, 444 (1992).
54. Y. H. Zhao and K. Lu, Phys. Rev. B 56, 14330 (1997).
55. W. A. Turner et al., J. Appl. Phys. 67, 7430 (1990).
56. M. Maeda and K. Ikeda, J. Appl. Phys. 83, 3865 (1998).
57. P. Wickboldt, F. C. Marques, S. J. Jones, D. Pang, W. A. Turner, and W. Paul, J. Non-Cryst. Solids 137, 83 (1991).
58. J. Kocka and M. Vanecek, Mater. Res. Soc. Symp. Proc. 95, 83 (1987).
59. M. Stutzmann, W. B. Jackson, and C. C. Tsai, Mater. Res. Soc. Symp. Proc. 49, 301 (1985).
60. W. E. Spear and M. Heintze, Philos. Mag. B 54, 343 (1986).
61. J. Fabian and P. B. Allen, Phys. Rev. Lett. 79, 1885 (1997).
62. J. A. Eastman and M. R. Fitzsimmons, J. Appl. Phys. 77, 522 (1995).
63. H. He and M. F. Thorpe, Phys. Rev, Lett. 54, 2107 (1985).
64. J. Robertson, Phys. Rev. Lett. 68, 220 (1992).