RESOLNRA: A new program for optimizing the achievable depth resolution of ion beam analysis methods

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 8, 2008, Pages 1852-1857

  Mayer, M ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

Computer simulation; Depth resolution; ERDA; Ion beam analysis; NRA; RBS; RESOLNRA; SIMNRA; Straggling

Indexed keywords

COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; DEPTH PERCEPTION; OPTICAL RESOLVING POWER; OPTIMAL SYSTEMS;

DEPTH RESOLUTION; ENERGY-LOSS STRAGGLING; ION BEAM ANALYSIS;

ION BEAMS;

EID: 43049166912     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.11.071     Document Type: Article

References (13)

1. Szilágyi E. Nucl. Instr. and Meth. B 37 (2000) 161
2. Szilágyi E., Pászti F., and Amsel G. Nucl. Instr. and Meth. B 100 (1995) 103
3. Amsel G., Battistig G., and L'Hoir A. Nucl. Instr. and Meth. B 201 (2003) 325
4. M. Mayer, SIMNRA User's Guide. Tech. Rep. IPP 9/113, Max-Planck-Institut für Plasmaphysik, Garching, 1997.
5. Mayer M., Arstila K., Nordlund K., Edelmann E., and Keinonen J. Nucl. Instr. and Meth. B 249 (2006) 823
6. M. Mayer, SIMNRA, a simulation program for the analysis of NRA, RBS and ERDA, in: J.L. Duggan, I. Morgan (Eds.), Proceedings of the 15th International Conference on the Application of Accelerators in Research and Industry, in: AIP Conference Proceedings, Vol. 475, American Institute of Physics, Woodbury, New York, 1999, p. 541.
7. Chu W.K., Mayer J.W., and Nicolet M.A. Backscattering Spectrometry (1978), Academic Press, New York, San Francisco, London
8. Yang Q., O'Connor D.J., and Wang Z. Nucl. Instr. and Meth. B 61 (1991) 149
9. Tschalär C. Nucl. Instr. and Meth. 61 (1968) 141
10. Tschalär C. Nucl. Instr. and Meth. 64 (1968) 237
11. Barradas N.P., Soares J.C., da Silva M.F., Pászti F., and Szilágyi E. Nucl. Instr. and Meth. B 94 (1994) 266
12. Barradas N.P. Nucl. Instr. and Meth. B 190 (2004) 247
13. Barradas N.P., Arstila K., Battistig G., Bianconi M., Dytlewski N., Jeynes C., Kótai E., Lulli G., Mayer M., Rauhala E., Szilágyi E., and Thompson M. Nucl. Instr. and Meth. B 262 (2007) 281