Correlation of surface, mechanical and microproperties of tetrahedral amorphous carbon films deposited under different magnetic confinement conditions

Applied Surface Science

Volumn 221, Issue 1-4, 2004, Pages 455-466

  Chua, Daniel H C ^a   Teo, K B K ^a   Tsai, T H ^a   Milne, W I ^a   Sheeja, D ^b   Tay, B K ^b   Schneider, D ^c  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

Cathodic vacuum arc; Tetrahedral amorphous carbon

Indexed keywords

CARBON; CURRENT DENSITY; ELASTIC MODULI; FILM GROWTH; FRICTION; KINETIC ENERGY; MAGNETIC FIELDS; MAGNETOMETERS; PLASTIC FILMS; RAMAN SCATTERING; SURFACE PROPERTIES; THIN FILMS; TRIBOLOGY; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

LASER WAVELENGTH; OPTICAL BANDGAP;

AMORPHOUS FILMS;

EID: 0344740924     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2003.07.002     Document Type: Article

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