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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 3, 2001, Pages 971-975

Hard graphitic-like amorphous carbon films with high stress and local microscopic density

(5) Lacerda, R G a Hammer, P a Lepienski, C M b Alvarez, F a Marques, F C a

a UNIVERSITY OF CAMPINAS (Brazil)

b FEDERAL UNIVERSITY OF PARANÁ (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL BONDS; COMPRESSIVE STRESS; HARDNESS; INDENTATION; INERT GASES; ION BEAM ASSISTED DEPOSITION; ION BOMBARDMENT; LATTICE CONSTANTS; PRESSURE EFFECTS; SPUTTER DEPOSITION;

MICROSCOPIC DENSITY; PLASMON ENERGY;

AMORPHOUS FILMS;

EID: 0035334829 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1365130 Document Type: Article

Times cited : (51)

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