Skewness of energy-loss straggling and multiple-scattering energy distributions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 268, Issue 11-12, 2010, Pages 1744-1748

  Mayer, M ^a   Arstila, K ^b   von Toussaint, U ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b IMEC   (Belgium)

Author keywords

Energy spread; Energy loss straggling; Multiple scattering; Skewness; Two piece normal distribution

Indexed keywords

ELECTRONIC ENERGIES; ENERGY DISTRIBUTIONS; ENERGY SPECTRA; ENERGY SPREAD; ENERGY SPREADS; ENERGY-LOSS STRAGGLING; EXPERIMENTAL DATA; GAUSSIAN FUNCTIONS; ION BEAM ANALYSIS; MONTE CARLO SIMULATION; MULTIPLE SMALL-ANGLE SCATTERING; SKEWED DISTRIBUTION; SWIFT IONS;

COMPUTER SIMULATION; ELECTRIC POWER DISTRIBUTION; MULTIPLE SCATTERING; NORMAL DISTRIBUTION; SPECTROSCOPY;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 77953132996     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2010.02.057     Document Type: Article

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