SCOPUS 정보 검색 플랫폼

European Journal of Inorganic Chemistry

Volumn , Issue 34, 2011, Pages 5305-5312

Atomic layer deposition of organic-inorganic hybrid materials based on unsaturated linear carboxylic acids

(4) Klepper, Karina B a Nilsen, Ola a Levy, Thomas a Fjellvåg, Helmer a

a UNIVERSITY OF OSLO (Norway)

Author keywords

Atomic layer deposition; Carboxylic acids; IR spectroscopy; Organic inorganic hybrid materials

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; CARBOXYLIC ACIDS; CRYSTALLINE MATERIALS; ORGANOMETALLICS; REFRACTIVE INDEX; SURFACE ROUGHNESS; THIN FILMS; TOPOGRAPHY; ULTRAVIOLET VISIBLE SPECTROSCOPY; WETTING;

ATOMIC-LAYER DEPOSITION; CIS CONFIGURATIONS; DEPOSITION TECHNIQUE; IR-SPECTROSCOPY; MATERIAL-BASED; ORGANIC-INORGANIC HYBRID MATERIALS; ROUGHNESS AND TOPOGRAPHY; TEMPERATURE DEPENDENT; TRANS CONFIGURATION; TRIMETHYLALUMINUM;

FOURIER TRANSFORM INFRARED SPECTROSCOPY;

EID: 81855203341 PISSN: 14341948 EISSN: 10990682 Source Type: Journal
DOI: 10.1002/ejic.201100192 Document Type: Article

Times cited : (29)

References (59)

1
- 70350569829
- R. J. Kuppler, D. J. Timmons, Q. R. Fang, J. R. Li, T. A. Makal, M. D. Young, D. Q. Yuan, D. Zhao, W. J. Zhuang, H. C. Zhou, Coord. Chem. Rev. 2009, 253, 3042-3066.
- (2009) Coord. Chem. Rev. , vol.253 , pp. 3042-3066
- Kuppler, R.J.¹ Timmons, D.J.² Fang, Q.R.³ Li, J.R.⁴ Makal, T.A.⁵ Young, M.D.⁶ Yuan, D.Q.⁷ Zhao, D.⁸ Zhuang, W.J.⁹ Zhou, H.C.¹⁰

2
- 65349161534
- D. Zacher, O. Shekhah, C. Woll, R. A. Fischer, Chem. Soc. Rev. 2009, 38, 1418-1429.
- (2009) Chem. Soc. Rev. , vol.38 , pp. 1418-1429
- Zacher, D.¹ Shekhah, O.² Woll, C.³ Fischer, R.A.⁴

3
- 75649140552
- S. M. George, Chem. Rev. 2010, 110, 111-131.
- (2010) Chem. Rev. , vol.110 , pp. 111-131
- George, S.M.¹

4
- 21744444606
- R. L. Puurunen, J. Appl. Phys. 2005, 97, 121301.
- (2005) J. Appl. Phys. , vol.97 , pp. 121301
- Puurunen, R.L.¹

5
- 0000836443
- M. Leskelä (Ed.:, Academic Press, San Diego CA
- M. Ritala, M. Leskelä in Handbook of Thin Film Materials, Vol. 1 (Ed.:, H. S. Nalwa), Academic Press, San Diego CA, 2002, pp. 103-159.
- (2002) Handbook of Thin Film Materials , vol.1 , pp. 103-159
- Ritala, M.¹ Nalwa, H.S.²

6
- 41849087709
- N. M. Adarnczyk, A. A. Dameron, S. M. George, Langmuir 2008, 24, 2081-2089.
- (2008) Langmuir , vol.24 , pp. 2081-2089
- Adarnczyk, N.M.¹ Dameron, A.A.² George, S.M.³

7
- 40649098863
- I. S. Bae, S. J. Cho, W. S. Choi, B. Y. Hong, Y. J. Kim, Y. M. Kim, J. H. Boo, Thin Solid Films 2008, 516, 3577-3581.
- (2008) Thin Solid Films , vol.516 , pp. 3577-3581
- Bae, I.S.¹ Cho, S.J.² Choi, W.S.³ Hong, B.Y.⁴ Kim, Y.J.⁵ Kim, Y.M.⁶ Boo, J.H.⁷

8
- 0142042819
- R. C. Chambers, E. J. Osburn Atkinson, D. McAdams, E. J. Hayden, D. J. Ankeny Brown, Chem. Commun. 2003, 2456-2457.
- (2003) Chem. Commun. , pp. 2456-2457
- Chambers, R.C.¹ Osburn Atkinson, E.J.² McAdams, D.³ Hayden, E.J.⁴ Ankeny Brown, D.J.⁵

9
- 0036799691
- C.-C. Chang, W.-C. Chen, Chem. Mater. 2002, 14, 4242-4248.
- (2002) Chem. Mater. , vol.14 , pp. 4242-4248
- Chang, C.-C.¹ Chen, W.-C.²

10
- 2442667581
- G. Gu, Z. Zhang, H. Dang, Mater. Res. Bull. 2004, 39, 1037-1044.
- (2004) Mater. Res. Bull. , vol.39 , pp. 1037-1044
- Gu, G.¹ Zhang, Z.² Dang, H.³

11
- 0345171063
- G. Gu, Z. Zhang, H. Dang, Appl. Surf. Sci. 2004, 221, 129-135.
- (2004) Appl. Surf. Sci. , vol.221 , pp. 129-135
- Gu, G.¹ Zhang, Z.² Dang, H.³

12
- 0036531814
- A. Kobayashi, H. Naito, Y. Matsuura, K. Matsukawa, S. Nihonyanagi, Y. Kanemitsu, J. Non-Cryst. Solids 2002, 299-302, 1052-1056.
- (2002) J. Non-Cryst. Solids , vol.299-302 , pp. 1052-1056
- Kobayashi, A.¹ Naito, H.² Matsuura, Y.³ Matsukawa, K.⁴ Nihonyanagi, S.⁵ Kanemitsu, Y.⁶

13
- 70350220866
- B. H. Lee, K. H. Lee, S. Im, M. M. Sung, J. Nanosci. Nanotechnol. 2009, 9, 6962-6967.
- (2009) J. Nanosci. Nanotechnol. , vol.9 , pp. 6962-6967
- Lee, B.H.¹ Lee, K.H.² Im, S.³ Sung, M.M.⁴

14
- 0038432263
- R. Makote, M. M. Collinson, Chem. Mater. 1998, 10, 2440-2445.
- (1998) Chem. Mater. , vol.10 , pp. 2440-2445
- Makote, R.¹ Collinson, M.M.²

15
- 0037268629
- F. Mammeri, L. Rozes, C. Sanchez, E. Le Bourhis, J. Sol-Gel Sci. Technol. 2003, 26, 413-417.
- (2003) J. Sol-Gel Sci. Technol. , vol.26 , pp. 413-417
- Mammeri, F.¹ Rozes, L.² Sanchez, C.³ Le Bourhis, E.⁴

16
- 49149102558
- M. Minelli, M. G. De Angelis, F. Doghieri, M. Marini, M. Toselli, F. Pilati, Eur. Polym. J. 2008, 44, 2581-2588.
- (2008) Eur. Polym. J. , vol.44 , pp. 2581-2588
- Minelli, M.¹ De Angelis, M.G.² Doghieri, F.³ Marini, M.⁴ Toselli, M.⁵ Pilati, F.⁶

17
- 0142056998
- N. Umeda, A. Shimojima, K. Kuroda, J. Organomet. Chem. 2003, 686, 223-227.
- (2003) J. Organomet. Chem. , vol.686 , pp. 223-227
- Umeda, N.¹ Shimojima, A.² Kuroda, K.³

18
- 0038476546
- M. N. Antipina, R. V. Gainutdinov, I. V. Golubeva, Y. A. Koksharov, A. P. Malakho, S. N. Polyakov, A. L. Tolstikhina, T. V. Yurova, G. B. Khomutov, Surf. Sci. 2003, 532-535, 1017-1024.
- (2003) Surf. Sci. , vol.532-535 , pp. 1017-1024
- Antipina, M.N.¹ Gainutdinov, R.V.² Golubeva, I.V.³ Koksharov, Y.A.⁴ Malakho, A.P.⁵ Polyakov, S.N.⁶ Tolstikhina, A.L.⁷ Yurova, T.V.⁸ Khomutov, G.B.⁹

19
- 45749115744
- A. A. Dameron, D. Seghete, B. B. Burton, S. D. Davidson, A. S. Cavanagh, J. A. Bertrand, S. M. George, Chem. Mater. 2008, 20, 3315-3326.
- (2008) Chem. Mater. , vol.20 , pp. 3315-3326
- Dameron, A.A.¹ Seghete, D.² Burton, B.B.³ Davidson, S.D.⁴ Cavanagh, A.S.⁵ Bertrand, J.A.⁶ George, S.M.⁷

20
- 66449127373
- S. M. George, B. Yoon, A. A. Dameron, Acc. Chem. Res. 2009, 42, 498-508.
- (2009) Acc. Chem. Res. , vol.42 , pp. 498-508
- George, S.M.¹ Yoon, B.² Dameron, A.A.³

21
- 78649693008
- K. B. Klepper, O. Nilsen, H. Fjellvag, Dalton Trans. 2010, 39, 11628-11635.
- (2010) Dalton Trans. , vol.39 , pp. 11628-11635
- Klepper, K.B.¹ Nilsen, O.² Fjellvag, H.³

22
- 85153185194
- Oslo, Norway
- K. B. Klepper, O. Nilsen, H. Fjellvåg, at Baltic Conference on Atomic Layer Deposition, Oslo, Norway, 2006.
- (2006) Baltic Conference on Atomic Layer Deposition
- Klepper, K.B.¹ Nilsen, O.² Fjellvåg, H.³

23
- 85153173126
- K. B. Klepper, O. Nilsen, H. Fjellvåg, at E-MRS 2007 Fall Meeting, Warsaw, Poland, 2007.
- (2007) E-MRS 2007 Fall Meeting, Warsaw, Poland
- Klepper, K.B.¹ Nilsen, O.² Fjellvåg, H.³

24
- 85153185107
- K. B. Klepper, O. Nilsen, H. Fjellvåg, at 7th International Conference on Atomic Layer Deposition, San Diego, California, USA, 2007.
- (2007) 7th International Conference on Atomic Layer Deposition, San Diego, California, USA
- Klepper, K.B.¹ Nilsen, O.² Fjellvåg, H.³

25
- 85153321738
- K. B. Klepper, O. Nilsen, H. Fjellvåg, at 8th International Conference on Atomic Layer Deposition, Bruges, Belgium, 2008.
- (2008) 8th International Conference on Atomic Layer Deposition, Bruges, Belgium
- Klepper, K.B.¹ Nilsen, O.² Fjellvåg, H.³

26
- 85153182574
- K. B. Klepper, O. Nilsen, H. Fjellvåg, at Baltic Conference on Atomic Layer Deposition, Uppsala, Sweden, 2009.
- (2009) Baltic Conference on Atomic Layer Deposition, Uppsala, Sweden
- Klepper, K.B.¹ Nilsen, O.² Fjellvåg, H.³

27
- 85153182323
- K. B. Klepper, O. Nilsen, H. Fjellvåg, at 9th International Conference on Atomic Layer Deposition, Monterey, CA, USA, 2009.
- (2009) 9th International Conference on Atomic Layer Deposition, Monterey, CA, USA
- Klepper, K.B.¹ Nilsen, O.² Fjellvåg, H.³

28
- 79954608617
- K. B. Klepper, O. Nilsen, P.-A. Hansen, H. Fjellvag, Dalton Trans. 2011, 40, 4636-4646.
- (2011) Dalton Trans. , vol.40 , pp. 4636-4646
- Klepper, K.B.¹ Nilsen, O.² Hansen, P.-A.³ Fjellvag, H.⁴

29
- 65349102319
- X. Liang, D. M. King, P. Li, S. M. George, A. W. Weimer, AIChE J. 2009, 55, 1030-1039.
- (2009) AIChE J. , vol.55 , pp. 1030-1039
- Liang, X.¹ King, D.M.² Li, P.³ George, S.M.⁴ Weimer, A.W.⁵

30
- 85153318089
- [Ed.: W. I. P. O. Patent Cooperation Treaty (PCT)]
- O. Nilsen, H. Fjellvåg [Ed.: W. I. P. O. Patent Cooperation Treaty (PCT)], 2006, p. 42.
- (2006) , pp. 42
- Nilsen, O.¹ Fjellvåg, H.²

31
- 63149152747
- H. Ø. Nielsen
- O. Nilsen, K. B. Klepper, H. Ø. Nielsen, H. Fjellvåg, ECS Trans. 2008, 16, 3-14.
- (2008) ECS Trans. , vol.16 , pp. 3-14
- Nilsen, O.¹ Klepper, K.B.² Fjellvåg, H.³

32
- 65249100080
- Q. Peng, B. Gong, R. M. VanGundy, G. N. Parsons, Chem. Mater. 2009, 21, 820-830.
- (2009) Chem. Mater. , vol.21 , pp. 820-830
- Peng, Q.¹ Gong, B.² Vangundy, R.M.³ Parsons, G.N.⁴

33
- 66449111154
- B. Yoon, J. L. O'Patchen, D. Seghete, A. S. Cavanagh, S. M. George, Chem. Vapor Depos. 2009, 15, 112-121.
- (2009) Chem. Vapor Depos. , vol.15 , pp. 112-121
- Yoon, B.¹ O'Patchen, J.L.² Seghete, D.³ Cavanagh, A.S.⁴ George, S.M.⁵

34
- 72149117683
- B. Yoon, D. Seghete, A. S. Cavanagh, S. M. George, Chem. Mater. 2009, 21, 5365-5374.
- (2009) Chem. Mater. , vol.21 , pp. 5365-5374
- Yoon, B.¹ Seghete, D.² Cavanagh, A.S.³ George, S.M.⁴

35
- 0001465391
- K. Chondroudis, D. B. Mitzi, Chem. Mater. 1999, 11, 3028-3030.
- (1999) Chem. Mater. , vol.11 , pp. 3028-3030
- Chondroudis, K.¹ Mitzi, D.B.²

36
- 0001338815
- D. B. Mitzi, K. Chondroudis, C. R. Kagan, Inorg. Chem. 1999, 38, 6246-6256.
- (1999) Inorg. Chem. , vol.38 , pp. 6246-6256
- Mitzi, D.B.¹ Chondroudis, K.² Kagan, C.R.³

37
- 0000058529
- D. B. Mitzi, M. T. Prikas, K. Chondroudis, Chem. Mater. 1999, 11, 542-544.
- (1999) Chem. Mater. , vol.11 , pp. 542-544
- Mitzi, D.B.¹ Prikas, M.T.² Chondroudis, K.³

38
- 27644436661
- Z. Y. Cheng, H. F. Wang, Z. W. Quan, C. K. Lin, J. Lin, Y. C. Han, J. Cryst. Growth 2005, 285, 352-357.
- (2005) J. Cryst. Growth , vol.285 , pp. 352-357
- Cheng, Z.Y.¹ Wang, H.F.² Quan, Z.W.³ Lin, C.K.⁴ Lin, J.⁵ Han, Y.C.⁶

39
- 0035498643
- D. Bersani, P. P. Lottici, M. Casalboni, P. Prosposito, Mater. Lett. 2001, 51, 208-212.
- (2001) Mater. Lett. , vol.51 , pp. 208-212
- Bersani, D.¹ Lottici, P.P.² Casalboni, M.³ Prosposito, P.⁴

40
- 0028768356
- M. Era, S. Morimoto, T. Tsutsui, S. Saito, Appl. Phys. Lett. 1994, 65, 676-678.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 676-678
- Era, M.¹ Morimoto, S.² Tsutsui, T.³ Saito, S.⁴

41
- 73649109531
- H. Han, J. Bissell, F. Yaghmaie, C. E. Davis, Langmuir 2010, 26, 515-520.
- (2010) Langmuir , vol.26 , pp. 515-520
- Han, H.¹ Bissell, J.² Yaghmaie, F.³ Davis, C.E.⁴

42
- 0033615351
- C. R. Kagan, D. B. Mitzi, C. D. Dimitrakopoulos, Science 1999, 286, 945-947.
- (1999) Science , vol.286 , pp. 945-947
- Kagan, C.R.¹ Mitzi, D.B.² Dimitrakopoulos, C.D.³

43
- 0035311644
- Y. H. Li, H. J. Zhang, S. B. Wang, Q. G. Meng, H. R. Li, X. H. Chuai, Thin Solid Films 2001, 385, 205-208.
- (2001) Thin Solid Films , vol.385 , pp. 205-208
- Li, Y.H.¹ Zhang, H.J.² Wang, S.B.³ Meng, Q.G.⁴ Li, H.R.⁵ Chuai, X.H.⁶

44
- 0034778584
- D. B. Mitzi, C. D. Dimitrakopoulos, L. L. Kosbar, Chem. Mater. 2001, 13, 3728-3740.
- (2001) Chem. Mater. , vol.13 , pp. 3728-3740
- Mitzi, D.B.¹ Dimitrakopoulos, C.D.² Kosbar, L.L.³

45
- 14044272004
- Z.-L. Xiao, H.-Z. Chen, M.-M. Shi, G. Wu, R.-J. Zhou, Z.-S. Yang, M. Wang, B.-Z. Tang, Mater. Sci. Eng. B 2005, 117, 313-316.
- (2005) Mater. Sci. Eng. B , vol.117 , pp. 313-316
- Xiao, Z.-L.¹ Chen, H.-Z.² Shi, M.-M.³ Wu, G.⁴ Zhou, R.-J.⁵ Yang, Z.-S.⁶ Wang, M.⁷ Tang, B.-Z.⁸

46
- 10644288475
- L. Li, M. Mizuhata, S. Deki, Appl. Surf. Sci. 2005, 239, 292-301.
- (2005) Appl. Surf. Sci. , vol.239 , pp. 292-301
- Li, L.¹ Mizuhata, M.² Deki, S.³

47
- 77955924127
- R. Martins, R. Silva, R. Gonçalves, O. Serra, J. Fluoresc. 2010, 20, 739-743.
- (2010) J. Fluoresc. , vol.20 , pp. 739-743
- Martins, R.¹ Silva, R.² Gonçalves, R.³ Serra, O.⁴

48
- 0037037635
- E. J. Nassar, R. R. Gonçalves, M. Ferrari, Y. Messaddeq, S. J. L. Ribeiro, J. Alloys Compd. 2002, 344, 221-225.
- (2002) J. Alloys Compd. , vol.344 , pp. 221-225
- Nassar, E.J.¹ Gonçalves, R.R.² Ferrari, M.³ Messaddeq, Y.⁴ Ribeiro, S.J.L.⁵

49
- 0141525090
- R. Houbertz, G. Domann, C. Cronauer, A. Schmitt, H. Martin, J. U. Park, L. Fröhlich, R. Buestrich, M. Popall, U. Streppel, P. Dannberg, C. Wächter, A. Bräuer, Thin Solid Films 2003, 442, 194-200.
- (2003) Thin Solid Films , vol.442 , pp. 194-200
- Houbertz, R.¹ Domann, G.² Cronauer, C.³ Schmitt, A.⁴ Martin, H.⁵ Park, J.U.⁶ Fröhlich, L.⁷ Buestrich, R.⁸ Popall, M.⁹ Streppel, U.¹⁰ Dannberg, P.¹¹ Wächter, C.¹² Bräuer, A.¹³

50
- 0032756028
- K. H. Haas, S. Amberg-Schwab, K. Rose, G. Schottner, Surf. Coat. Technol. 1999, 111, 72-79.
- (1999) Surf. Coat. Technol. , vol.111 , pp. 72-79
- Haas, K.H.¹ Amberg-Schwab, S.² Rose, K.³ Schottner, G.⁴

51
- 0001717183
- G. Cao, M. E. Garcia, M. Alcala, L. F. Burgess, T. E. Mallouk, J. Am. Chem. Soc. 1992, 114, 7574-7575.
- (1992) J. Am. Chem. Soc. , vol.114 , pp. 7574-7575
- Cao, G.¹ Garcia, M.E.² Alcala, M.³ Burgess, L.F.⁴ Mallouk, T.E.⁵

52
- 27844524984
- J. A. de Saja, M. L. Rodriguez-Mendez, Adv. Colloid Interface Sci. 2005, 116, 1-11.
- (2005) Adv. Colloid Interface Sci. , vol.116 , pp. 1-11
- De Saja, J.A.¹ Rodriguez-Mendez, M.L.²

53
- 0031651455
- B. Darracq, F. Chaput, K. Lahlil, J.-P. Boilot, Y. Levy, V. Alain, L. Ventelon, M. Blanchard-Desce, Opt. Mater. 1998, 9, 265-270.
- (1998) Opt. Mater. , vol.9 , pp. 265-270
- Darracq, B.¹ Chaput, F.² Lahlil, K.³ Boilot, J.-P.⁴ Levy, Y.⁵ Alain, V.⁶ Ventelon, L.⁷ Blanchard-Desce, M.⁸

54
- 69949154733
- D. C. Miller, R. R. Foster, S. H. Jen, J. A. Bertrand, D. Seghete, B. Yoon, Y. C. Lee, S. M. George, M. L. Dunn, Acta Materialia 2009, 57, 5083-5092.
- (2009) Acta Materialia , vol.57 , pp. 5083-5092
- Miller, D.C.¹ Foster, R.R.² Jen, S.H.³ Bertrand, J.A.⁴ Seghete, D.⁵ Yoon, B.⁶ Lee, Y.C.⁷ George, S.M.⁸ Dunn, M.L.⁹

55
- 84951279351
- G. Sauerbrey, Z. Phys. 1959, 155, 206-222.
- (1959) Z. Phys. , vol.155 , pp. 206-222
- Sauerbrey, G.¹

56
- 6444224726
- Wolfman-Robichaud S. 7th ed. (Ed.:, John Wiley & Sons Inc., Hoboken, NJ
- R. M. Silverstein, F. X. Webster, D. J. Kiemle in Spectrometric Identification of Organic Compounds, 7th ed. (Ed.:, S. Wolfman-Robichaud), John Wiley & Sons Inc., Hoboken, NJ, 2005, pp. 72-126.
- (2005) Spectrometric Identification of Organic Compounds , pp. 72-126
- Silverstein, R.M.¹ Webster, F.X.² Kiemle, D.J.³

57
- 0142080105
- H. F. Shurvell, (Eds.:, John Wiley & Sons Ltd., Chichester, UK
- H. F. Shurvell in Handbook of Vibrational Spectroscopy-Sample Characterisation and Spectral Data processing, Vol. 3 (Eds.:, J. M. Chalmers, P. R. Griffiths), John Wiley & Sons Ltd., Chichester, UK, 2002, pp. 1783-1816.
- (2002) Handbook of Vibrational Spectroscopy-Sample Characterisation and Spectral Data Processing , vol.3 , pp. 1783-1816
- Chalmers, J.M.¹ Griffiths, P.R.²

58
- 0033325561
- F. Verpoort, T. Haemers, P. Roose, J. P. Maes, Appl. Spectrosc. 1999, 53, 1528-1534.
- (1999) Appl. Spectrosc. , vol.53 , pp. 1528-1534
- Verpoort, F.¹ Haemers, T.² Roose, P.³ Maes, J.P.⁴

59
- 79954579774
- 2nd ed., Omega Data Systems, NL-5505 Veldhoven, The Netherlands
- Neptunus 2, 2nd ed., Omega Data Systems, NL-5505 Veldhoven, The Netherlands, 1994.
- (1994) Neptunus 2

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.