Layer-by-layer deposition of Ti-4,4′-oxydianiline hybrid thin films

Applied Surface Science

Volumn 257, Issue 15, 2011, Pages 6435-6439

  Sood, Anjali ^a   Sundberg, Pia ^a   Malm, Jari ^a   Karppinen, Maarit ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

Atomic layer deposition; Inorganic organic hybrid; Molecular layer deposition

Indexed keywords

ATMOSPHERIC TEMPERATURE; CHLORINE COMPOUNDS; HYBRID MATERIALS; SELF ASSEMBLY; THIN FILMS; TITANIUM COMPOUNDS;

INCREASING TEMPERATURES; INORGANIC-ORGANIC HYBRID; INORGANIC-ORGANIC HYBRID MATERIALS; LAYER BY LAYER DEPOSITION; MOLECULAR LAYER DEPOSITION; MOLECULAR LAYER DEPOSITIONS (MLD); TEMPERATURE RANGE; THIN-FILM TECHNIQUE;

ATOMIC LAYER DEPOSITION;

EID: 79954611489     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.02.022     Document Type: Article

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