Deposition of organic-inorganic hybrid materials by atomic layer deposition

ECS Transactions

Volumn 16, Issue 4, 2009, Pages 3-14

  Nilsen, Ola ^a   Klepper, Karina B ^a   Nielsen, Heidi Ø ^a   Fjellvåg, Helmer ^a  

^a UNIVERSITY OF OSLO   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

AMINES; ATOMS; DEPOSITION RATES; FILMS; GROWTH RATE; ORGANIC-INORGANIC MATERIALS; PHYSICOCHEMICAL PROPERTIES; RIGID STRUCTURES;

ALD GROWTH; BUILDING UNITS; INORGANIC COMPONENTS; INORGANIC MATERIALS; INORGANIC PRECURSOR; NANOSTRUCTURED HYBRIDS; ORGANIC-INORGANIC HYBRID; ORGANIC-INORGANIC HYBRID MATERIALS;

ATOMIC LAYER DEPOSITION;

EID: 63149152747     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2979975     Document Type: Conference Paper

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