Metalcone and metalcone/metal oxide alloys grown using atomic & molecular layer deposition

ECS Transactions

Volumn 41, Issue 2, 2011, Pages 131-138

  Lee, B H ^a   Anderson, V R ^a   George, S M ^a,b  

^a UNIVERSITY OF COLORADO   (United States)

^b UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM ALLOYS; ALUMINUM OXIDE; ATOMS; ETHYLENE; ETHYLENE GLYCOL; INORGANIC POLYMERS; METALLIC FILMS; METALS; ORGANIC POLYMERS; ORGANIC-INORGANIC MATERIALS; ORGANOMETALLICS; POLYMER FILMS; THIN FILMS; ZIRCALOY; ZIRCONIA;

FUNCTIONAL PROPERTIES; HYBRID ORGANIC-INORGANIC; HYBRID ORGANIC-INORGANIC POLYMERS; METAL ALKOXIDES; METAL OXIDES; MOLECULAR LAYER DEPOSITION; ORGANOMETALLIC PRECURSORS; TERT-BUTOXIDE;

ATOMIC LAYER DEPOSITION;

EID: 84863123503     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3633661     Document Type: Conference Paper

References (13)

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