Effects of excitation laser wavelength on Ly-α and He-α line emission from nitrogen plasmas

Physics of Plasmas

Volumn 20, Issue 1, 2013, Pages

  Harilal, S S ^a   Miloshevsky, G V ^a   Sizyuk, T ^a   Hassanein, A ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

1064 NM; EMITTING RADIATION; EXCITATION LASERS; LASER WAVELENGTH; LINE EMISSIONS; MAXIMUM EMISSIONS; ND : YAG LASERS; OPTIMAL TEMPERATURE; SPECTRAL LINE;

CONVERSION EFFICIENCY; NITROGEN PLASMA; OPTICAL PROPERTIES;

NEODYMIUM LASERS;

EID: 84873680813     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4775725     Document Type: Article

References (49)

1. J. F. Adam, J. P. Moy, and J. Susini, Rev. Sci. Instrum. 76, 091301 (2005). 10.1063/1.2018633
2. C. Jacobsen, Trends Cell Biol. 9, 44 (1999). 10.1016/S0962-8924(98)01424- X
3. J. Maser, A. Osanna, Y. Wang, C. Jacobsen, J. Kirz, S. Spector, B. Winn, and D. Tennant, J. Microsc. Oxford 197, 68 (2000). 10.1046/j.1365-2818.2000. 00630.x
4. D. Eichert, L. Gregoratti, B. Kaulich, A. Marcello, P. Melpignano, L. Quaroni, and M. Kiskinova, Anal. Bioanal. Chem. 389, 1121 (2007). 10.1007/s00216-007-1532-4
5. W. Meyer-Ilse, D. Hamamoto, A. Nair, S. A. Lelievre, G. Denbeaux, L. Johnson, A. L. Pearson, D. Yager, M. A. Legros, and C. A. Larabell, J. Microsc. Oxford 201, 395 (2001). 10.1046/j.1365-2818.2001.00845.x
6. J. J. Rocca, E. C. Hammarsten, E. Jankowska, J. Filevich, M. C. Marconi, S. Moon, and V. N. Shlyaptsev, Phys. Plasmas 10, 2031 (2003). 10.1063/1.1557056
7. K. Lan, Y. Q. Zhang, and W. D. Zheng, Phys. Plasmas 6, 4343 (1999). 10.1063/1.873698
8. R. de Bruijn, K. N. Koshelev, S. V. Zakharov, V. G. Novikov, and F. Bijkerk, Phys. Plasmas 12, 042701 (2005). 10.1063/1.1857914
9. M. Murakami, S. Fujioka, H. Nishimura, T. Ando, N. Ueda, Y. Shimada, and M. Yamaura, Phys. Plasmas 13, 033107 (2006). 10.1063/1.2187445
10. K. Nishihara, A. Sunahara, A. Sasaki, M. Nunami, H. Tanuma, S. Fujioka, Y. Shimada, K. Fujima, H. Furukawa, T. Kato, F. Koike, R. More, M. Murakami, T. Nishikawa, V. Zhakhovskii, K. Gamata, A. Takata, H. Ueda, H. Nishimura, Y. Izawa, N. Miyanaga, and K. Mima, Phys. Plasmas 15, 056708 (2008). 10.1063/1.2907154
11. P. Yeates and E. T. Kennedy, Phys. Plasmas 17, 093104 (2010). 10.1063/1.3484227
12. P. Gibbon, Phys. Rev. Lett. 76, 50 (1996). 10.1103/PhysRevLett.76.50
13. Y. Liu, Q. Dong, X. Peng, Z. Jin, and J. Zhang, Phys. Plasmas 16, 043301 (2009). 10.1063/1.3125308
14. Y. Wang, C. Jacobsen, J. Maser, and A. Osanna, J. Microsc. Oxford 197, 80 (2000). 10.1046/j.1365-2818.2000.00629.x
15. P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, J. Microsc. Oxford 226, 175 (2007). 10.1111/j.1365-2818.2007. 01765.x
16. K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. N. Kim, Y. Namba, and K. H. Yoon, Phys. Med. Biol. 51, N99 (2006). 10.1088/0031-9155/ 51/6/N01
17. M. Bertilson, O. von Hofsten, U. Vogt, A. Holmberg, A. E. Christakou, and H. M. Hertz, Opt. Lett. 36, 2728 (2011). 10.1364/OL.36.002728
18. J. de Groot, O. Hemberg, A. Holmberg, and H. M. Hertz, J. Appl. Phys. 94, 3717 (2003). 10.1063/1.1602571
19. H. M. Hertz, G. A. Johansson, H. Stollberg, J. de Groot, O. Hemberg, A. Holmberg, S. Rehbein, P. Jansson, F. Eriksson, and J. Birch, J. Phys. IV 104, 115 (2003). 10.1051/jp4:200300041
20. H. M. Hertz, O. von Hofsten, M. Bertilson, U. Vogt, A. Holmberg, J. Reinspach, D. Martz, M. Selin, A. E. Christakou, J. Jerlstrom-Hultqvist, and S. Svard, J. Struc. Biol. 177, 267 (2012). 10.1016/j.jsb.2011.11.015
21. M. Lysaght, D. Kilbane, N. Murphy, A. Cummings, P. Dunne, and G. O'Sullivan, Phys. Rev. A 72, 014502 (2005). 10.1103/PhysRevA.72.014502
22. J. R. Freeman, S. S. Harilal, B. Verhoff, and A. Hassanein, Plasma Sources Sci. Technol. 21, 055003 (2012). 10.1088/0963-0252/21/5/055003
23. S. S. Harilal, T. Sizyuk, A. Hassanein, D. Campos, P. Hough, and V. Sizyuk, J. Appl. Phys. 109, 063306 (2011). 10.1063/1.3562143
24. M. Crank, S. S. Harilal, S. M. Hassan, and A. Hassanein, J. Appl. Phys. 111, 033301 (2012). 10.1063/1.3682087
25. T. Tomie, J. Micro/Nanolithogr. MEMS MOEMS 11, 021109 (2012). 10.1117/1.JMM.11.2.021109
26. G. O'Sullivan and B. Li, J. Micro/Nanolithogr. MEMS MOEMS 11, 021108 (2012). 10.1117/1.JMM.11.2.021108
27. A. Hassanein and I. Konkashbaev, J. Nucl. Mater. 273, 326 (1999). 10.1016/S0022-3115(99)00052-5
28. V. Sizyuk, A. Hassanein, V. Morozov, and T. Sizyuk, " Heights integrated model as instrument for simulation of hydrodynamic, radiation transport, and heat conduction phenomena of laser-produced plasma in EUV applications.," Report No. ANL-MCS-CPH-06/56 (Argonne National Laboratory, 2006).
29. V. Sizyuk, A. Hassanein, V. Morozov, V. Tolkach, T. Sizyuk, and B. Rice, Numer. Heat Trans. A 49, 215 (2006). 10.1080/10407780500324996
30. G. Miloshevsky, V. Tolkach, S. Rozin, and G. Shani, Nucl. Instrum. Methods Phys. Res. B 168, 467 (2000). 10.1016/S0168-583X(00)00039-2
31. G. Miloshevsky, V. Tolkach, G. Shani, and S. Rozin, Nucl. Instrum. Methods Phys. Res. B 192, 360 (2002). 10.1016/S0168-583X(02)00489-5
32. V. Tolkach, V. Morozov, and A. Hassanein, " Development of comprehensive models for opacities and radiation transport for IFE systems.," Report No. ANL-ET/02-23 (Argonne National Laboratory, 2002).
33. J. C. Slater, Phys. Rev. 81, 385 (1951). 10.1103/PhysRev.81.385
34. A. Hassanein, V. Sizyuk, T. Sizyuk, and S. S. Harilal, J. Micro/Nanolithogr. MEMS MOEMS 8, 041503 (2009). 10.1117/1.3224901
35. A. Hassanein, T. Sizyuk, V. Sizyuk, and S. S. Harilal, J. Micro/Nanolithogr. MEMS MOEMS 10, 033002 (2011). 10.1117/1.3609043
36. OSLO optical design software, Lambda Research Corporation, MA.
37. S. S. Harilal, R. W. Coons, P. Hough, and A. Hassanein, Appl. Phys. Lett. 95, 221501 (2009). 10.1063/1.3270526
38. P. A. C. Jansson, U. Vogt, and H. M. Hertz, Rev. Sci. Instrum. 76, 043503 (2005). 10.1063/1.1884186
39. B. Kim, B. Ahn, D. Lee, J. Kim, and D. Kim, Appl. Phys. Lett. 88, 141501 (2006). 10.1063/1.2192088
40. M. Wieland, M. Faubel, B. Schmidt, U. Vogt, and T. Wilhein, Proc. SPIE 4504, 62 (2001). 10.1117/12.448479
41. R. Lebert, G. Schriever, T. Wilhein, and B. Niemann, J. Appl. Phys. 84, 3419 (1998). 10.1063/1.368502
42. J. Son, M. Cho, D. Kim, B. Ahn, and J. Kim, Appl. Phys. Lett. 90, 261502 (2007). 10.1063/1.2751581
43. P. W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, and M. Szczurek, Nucl. Instrum. Methods Phys. Res. B 268, 1692 (2010). 10.1016/j.nimb.2010.02.002
44. M. Wieland, U. Vogt, M. Faubel, T. Wilhein, D. Rudolph, and G. Schmahl, AIP Conf. Proc. 507, 726 (2000).
45. H. Fiedorowicz, A. Bartnik, M. Horvath, L. Juha, K. Jungwirth, B. Kralikova, J. Krasa, T. Mocek, M. Pfeifer, L. Pina, J. Skala, J. Ullschmied, and J. Wawer, Proc. SPIE 4502, 47 (2001). 10.1117/12.449852
46. S. S. Harilal, T. Sizyuk, V. Sizyuk, and A. Hassanein, Appl. Phys. Lett. 96, 111503 (2010). 10.1063/1.3364141
47. S. S. Harilal, B. O'Shay, M. S. Tillack, and Y. Tao, J. Phys. D 39, 484 (2006). 10.1088/0022-3727/39/3/010
48. T. Sizyuk and A. Hassanein, J. Appl. Phys. 112, 033102 (2012). 10.1063/1.4740230
49. M. Yamaura, S. Uchida, A. Sunahara, Y. Shimada, H. Nishimura, S. Fujioka, T. Okuno, K. Hashimoto, K. Nagai, T. Norimatsu, K. Nishihara, N. Miyanga, Y. Izawa, and C. Yamanaka, Appl. Phys. Lett. 86, 181107 (2005). 10.1063/1.1915507