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Applied Physics Letters

Volumn 95, Issue 22, 2009, Pages

Influence of spot size on extreme ultraviolet efficiency of laser-produced Sn plasmas

(4) Harilal, S S a Coons, R W a Hough, P b Hassanein, A a

a PURDUE UNIVERSITY (United States)

b DUBLIN CITY UNIVERSITY (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

13.5 NM; EFFICIENT COUPLING; EXTREME ULTRAVIOLET; FOCAL POSITIONS; PULSE WIDTH; SPOT SIZES; STEEP DENSITY GRADIENTS;

CONVERSION EFFICIENCY; LASER PRODUCED PLASMAS; LASERS; TIN; ULTRAVIOLET DEVICES;

PULSED LASER APPLICATIONS;

EID: 71949128381 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3270526 Document Type: Article

Times cited : (58)

References (12)

1
- 84960259042
- (SPIE, New York).
- V. Bakshi, EUV Sources for Lithography (SPIE, New York, 2006).
- (2006) EUV Sources for Lithography
- Bakshi, V.¹

2
- 33745748303
- Extreme-ultraviolet spectral purity and magnetic ion debris mitigation by use of low-density tin targets
- DOI 10.1364/OL.31.001549
- S. S. Harilal, M. S. Tillack, B. O'Shay, Y. Tao, and A. Nikroo, Opt. Lett. 0146-9592 31, 1549 (2006). 10.1364/OL.31.001549 (Pubitemid 44014498)
- (2006) Optics Letters , vol.31 , Issue.10 , pp. 1549-1551
- Harilal, S.S.¹ Tillack, M.S.² Tao, Y.³ O'Shay, B.⁴ Paguio, R.⁵ Nikroo, A.⁶

3
- 33847730710
- Investigation of the interaction of a laser pulse with a preformed Gaussian Sn plume for an extreme ultraviolet lithography source
- DOI 10.1063/1.2426883
- Y. Tao, M. S. Tillack, S. S. Harilal, K. L. Sequoia, and F. Najmabadi, J. Appl. Phys. 0021-8979 101, 023305 (2007). 10.1063/1.2426883 (Pubitemid 46372758)
- (2007) Journal of Applied Physics , vol.101 , Issue.2 , pp. 023305
- Tao, Y.¹ Tillack, M.S.² Harilal, S.S.³ Sequoia, K.L.⁴ Najmabadi, F.⁵

4
- 34247195637
- Extreme ultraviolet source using a forced recombination process in lithium plasma generated by a pulsed laser
- DOI 10.1063/1.2719672
- A. Nagano, T. Inoue, P. E. Nica, S. Amano, S. Miyamoto, and T. Mochizuki, Appl. Phys. Lett. 0003-6951 90, 151502 (2007). 10.1063/1.2719672 (Pubitemid 46609821)
- (2007) Applied Physics Letters , vol.90 , Issue.15 , pp. 151502
- Nagano, A.¹ Inoue, T.² Nica, P.-E.³ Amano, S.⁴ Miyamoto, S.⁵ Mochizuki, T.⁶

5
- 34248370183
- Efficient extreme ultraviolet plasma source generated by a CO2 laser and a liquid xenon microjet target
- DOI 10.1063/1.2738190
- Y. Ueno, T. Ariga, G. Soumagne, T. Higashiguchi, S. Kubodera, I. Pogorelsky, I. Pavlishin, D. Stolyarov, M. Babzien, K. Kusche, and V. Yakimenko, Appl. Phys. Lett. 0003-6951 90, 191503 (2007). 10.1063/1.2738190 (Pubitemid 46738077)
- (2007) Applied Physics Letters , vol.90 , Issue.19 , pp. 191503
- Ueno, Y.¹ Ariga, T.² Soumagne, G.³ Higashiguchi, T.⁴ Kubodera, S.⁵ Pogorelsky, I.⁶ Pavlishin, I.⁷ Stolyarov, D.⁸ Babzien, M.⁹ Kusche, K.¹⁰ Yakimenko, V.¹¹

6
- 34247874741
- Optimizing 13.5 nm laser-produced tin plasma emission as a function of laser wavelength
- DOI 10.1063/1.2735944
- J. White, P. Dunne, P. Hayden, F. O'Reilly, and G. O'Sullivan, Appl. Phys. Lett. 0003-6951 90, 181502 (2007). 10.1063/1.2735944 (Pubitemid 46701129)
- (2007) Applied Physics Letters , vol.90 , Issue.18 , pp. 181502
- White, J.¹ Dunne, P.² Hayden, P.³ O'Reilly, F.⁴ O'Sullivan, G.⁵

7
- 33750032581
- Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas
- DOI 10.1063/1.2361260
- T. Ando, S. Fujioka, H. Nishimura, N. Ueda, Y. Yasuda, K. Nagai, T. Norimatsu, M. Murakami, K. Nishihara, N. Miyanaga, Y. Izawa, K. Mima, and A. Sunahara, Appl. Phys. Lett. 0003-6951 89, 151501 (2006). 10.1063/1.2361260 (Pubitemid 44570525)
- (2006) Applied Physics Letters , vol.89 , Issue.15 , pp. 151501
- Ando, T.¹ Fujioka, S.² Nishimura, H.³ Ueda, N.⁴ Yasuda, Y.⁵ Nagai, K.⁶ Norimatsu, T.⁷ Murakami, M.⁸ Nishihara, K.⁹ Miyanaga, N.¹⁰ Izawa, Y.¹¹ Mima, K.¹² Sunahara, A.¹³

8
- 36849083445
- 2 laser-produced Sn plasma using a cavity target
- DOI 10.1063/1.2820451
- Y. Ueno, G. Soumagne, A. Sumitani, A. Endo, and T. Higashiguchi, Appl. Phys. Lett. 0003-6951 91, 231501 (2007). 10.1063/1.2820451 (Pubitemid 350234421)
- (2007) Applied Physics Letters , vol.91 , Issue.23 , pp. 231501
- Ueno, Y.¹ Soumagne, G.² Sumitani, A.³ Endo, A.⁴ Higashiguchi, T.⁵

9
- 37549068496
- 0021-8979,. 10.1063/1.2822450
- S. S. Harilal, J. Appl. Phys. 0021-8979 102, 123306 (2007). 10.1063/1.2822450
- (2007) J. Appl. Phys. , vol.102 , pp. 123306
- Harilal, S.S.¹

10
- 61349109988
- 0003-6951,. 10.1063/1.3082035
- A. Kasperczuk, T. Pisarczyk, M. Kalal, J. Ullschmied, E. Krousky, K. Masek, M. Pfeifer, K. Rohlena, J. Skala, and P. Pisarczyk, Appl. Phys. Lett. 0003-6951 94, 081501 (2009). 10.1063/1.3082035
- (2009) Appl. Phys. Lett. , vol.94 , pp. 081501
- Kasperczuk, A.¹ Pisarczyk, T.² Kalal, M.³ Ullschmied, J.⁴ Krousky, E.⁵ Masek, K.⁶ Pfeifer, M.⁷ Rohlena, K.⁸ Skala, J.⁹ Pisarczyk, P.¹⁰

11
- 63649141412
- 0034-6748,. 10.1063/1.3079698
- N. Hurst and S. S. Harilal, Rev. Sci. Instrum. 0034-6748 80, 035101 (2009). 10.1063/1.3079698
- (2009) Rev. Sci. Instrum. , vol.80 , pp. 035101
- Hurst, N.¹ Harilal, S.S.²

12
- 33847688151
- Simplified calculation of nonlocal thermodynamic equilibrium excited state populations contributing to 13.5 nm emission in a tin plasma
- DOI 10.1063/1.2434965
- J. White, A. Cummings, P. Dunne, P. Hayden, and G. O'Sullivan, J. Appl. Phys. 0021-8979 101, 043301 (2007). 10.1063/1.2434965 (Pubitemid 46362900)
- (2007) Journal of Applied Physics , vol.101 , Issue.4 , pp. 043301
- White, J.¹ Cummings, A.² Dunne, P.³ Hayden, P.⁴ O'Sullivan, G.⁵

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