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Applied Physics Letters

Volumn 96, Issue 11, 2010, Pages

Efficient laser-produced plasma extreme ultraviolet sources using grooved Sn targets

(4) Harilal, S S a Sizyuk, T a Sizyuk, V a Hassanein, A a

a Purdue University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

13.5 NM; EXTREME ULTRAVIOLET SOURCES; EXTREME ULTRAVIOLETS; GENERATION METHOD; HYDRODYNAMIC EXPANSION; MODELING STUDIES; PRODUCTION ZONES; TARGET POSITION;

CONVERSION EFFICIENCY; LASER PRODUCED PLASMAS; PULSED LASER APPLICATIONS; TARGETS; TIN; TITANIUM COMPOUNDS; ULTRAVIOLET DEVICES;

ULTRAVIOLET LASERS;

EID: 77949702791 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3364141 Document Type: Article

Times cited : (54)

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