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Plasma Sources Science and Technology

Volumn 21, Issue 5, 2012, Pages

Laser wavelength dependence on angular emission dynamics of Nd:YAG laser-produced Sn plasmas

(5) Freeman, J R a Harilal, S S a Verhoff, B a Hassanein, A a Rice, B b

a PURDUE UNIVERSITY (United States)

b SEMATECH (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR EMISSION; ANGULAR VARIATION; CIRCULAR PATHS; EXCITATION WAVELENGTH; FARADAY CUPS; FORWARD BIAS; ION FLUXES; IONIC EMISSION; IONIC PLASMAS; LASER WAVELENGTH; LASER-WAVELENGTH EFFECTS; ND : YAG LASERS; PARTICLE ANALYSIS; PLASMA EMISSION; SECOND AND FOURTH HARMONICS; SHORTER WAVELENGTH; SPECTRAL REGION;

ATOMS; DEBRIS; EXTREME ULTRAVIOLET LITHOGRAPHY; NEODYMIUM; PLASMAS; TIN;

NEODYMIUM LASERS;

EID: 84866340671 PISSN: 09630252 EISSN: 13616595 Source Type: Journal
DOI: 10.1088/0963-0252/21/5/055003 Document Type: Article

Times cited : (44)

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