Spectral control of emissions from tin doped targets for extreme ultraviolet lithography

Journal of Physics D: Applied Physics

Volumn 39, Issue 3, 2006, Pages 484-487

  Harilal, S S ^a   O'Shay, B ^a   Tillack, M S ^a   Tao, Y ^a   Paguio, R ^b   Nikroo, A ^b   Back, C A ^b  

^a UNIVERSITY OF CALIFORNIA SAN DIEGO   (United States)

^b GENERAL ATOMICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALORIMETERS; LIGHT EMISSION; PLASMAS; SPECTROGRAPHS; TIN; ULTRAVIOLET RADIATION;

EUV IN-BAND CONVERSION EFFICIENCY; SPECTRAL CONTROL; ULTRAVIOLET LITHOGRAPHY; UNRESOLVED TRANSITION ARRAY (UTA);

LITHOGRAPHY;

EID: 31144431897     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/3/010     Document Type: Article

References (23)

1. Myers D W, Fomenkov I V, Partlo W, Brandt D C and Klene B C 2005 Solid State Technol. 48 67-9
2. Marx B 2003 Laser Focus World 39 34-7
3. Rajyaguru C, Higashiguchi T, Koga M, Kawasaki K, Hamada M, Dojyo N, Sasaki W and Kubodera S 2005 Appl. Phys. B 80 409-12
4. Miyamoto M, Shimoura A, Amano S, Fukugaki K, Kinugasa H, Inoue T and Mochizuki T 2005 Appl. Phys. Lett. 86 261502
5. Shimada Y et al 2005 Appl. Phys. Lett. 86 051501
6. Harilal S S, O'Shay B, Tillack M S and Mathew M V 2005 J. Appl. Phys. 98 013306
7. Harilal S S, O'Shay B and Tillack M S 2005 J. Appl. Phys. 98 036102
8. Takenoshita K, Koay C S, Teerawattanasook S, Richardson M and Bakshi V 2005 Proc. SPIE 5751 563-71
9. Flora F, Mezi L, Zheng C E and Bonfigli F 2001 Europhys. Lett. 56 676-82
10. Richardson M, Koay C S, Takenoshita K, Keyser C and Al-Rabban M 2004 J. Vac. Sci. Technol. 22 785-90
11. Tanaka H, Akinaga K, Takahashi A and Okada T 2004 Appl. Phys. A 79 1493-5
12. Cummings A, O'Sullivan G, Dunne P, Sokell E, Murphy N and White J 2005 J. Phys. D: Appl. Phys. 38 604-16
13. Hayden P, Cummings A, Gaynor L, Murphy N, O'Sullivan G, Sheridan P, Sokell E, White J and Dunne P 2005 Proc. SPIE 5751 919-26
14. Fujioka S et al 2005 Proc. SPIE 5751 578-87
15. O'Sullivan G and Faulkner R 1994 Opt. Eng. 33 3978-83
16. Tao Y et al 2004 Appl. Phys. Lett. 85 1919-21
17. Harilal S S, Bindhu C V and Kunze H J 2001 J. Phys. D: Appl. Phys. 34 560-6
18. Fujioka S et al 2005 Phys. Rev. Lett. 95 235004
19. Sasaki A, Nishihara K, Koike F, Kagawa T, Nishikawa T, Fujima K, Kawamura T and Furukawa H 2004 IEEE J. Sel. Top. Quantum Electron. 10 1307-15
20. Ryabtsev A, Tolstihina I, Churilov S and Koshelev K 2004 EUV Source Modeling Workshop (Miyazaki, Japan)
21. Griem H R 1997 Principles of Plasma Spectroscopy (Cambridge: Cambridge University Press)
22. Harilal S S, Tillack M S, O'Shay B, Bindhu C V and Najmabadi F 2004 Phys. Rev. E 69 026413
23. Harilal S S, Tao Y, O'Shay B and Tillack M S 2006 unpublished