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Volumn 266, Issue , 2013, Pages 440-444
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Effects of power on properties of ZnO thin films grown by radio frequency magnetron sputtering
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Author keywords
Magnetron sputtering; Power; ZnO
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
FILM GROWTH;
II-VI SEMICONDUCTORS;
MAGNETRON SPUTTERING;
OPTICAL PROPERTIES;
OXIDE FILMS;
RADIO WAVES;
ZINC OXIDE;
ABSORPTION AND PHOTOLUMINESCENCE;
DYNAMICS EQUATION;
INFLECTION POINTS;
PHYSICAL MECHANISM;
POWER;
QUALITATIVE MODEL;
RADIO FREQUENCY MAGNETRON SPUTTERING;
SPUTTERING TECHNIQUES;
THIN FILMS;
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EID: 84872820368
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2012.12.055 Document Type: Article |
Times cited : (16)
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References (18)
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