The influence of using different substrates on the structural and optical characteristics of ZnO thin films

Applied Surface Science

Volumn 256, Issue 6, 2010, Pages 1807-1811

  Prepelita, Petronela ^a   Medianu, R ^a   Sbarcea, Beatrice ^b   Garoi, F ^a   Filipescu, Mihaela ^a  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

^b Electrical Engineering Co   (Romania)

Author keywords

Magnetron sputtering; Optical properties; Structural properties; Thin film; Various substrates; ZnO

Indexed keywords

GLASS; II-VI SEMICONDUCTORS; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; OPTICAL PROPERTIES; STRUCTURAL PROPERTIES; THIN FILMS; ZINC OXIDE; ZINC SULFIDE;

DEPOSITION CONDITIONS; DIFFERENT SUBSTRATES; OPTICAL CHARACTERISTICS; OXIDATION CONDITIONS; RADIO FREQUENCY MAGNETRON SPUTTERING; SUBSTRATE SURFACE; TRANSMISSION SPECTRUMS; VARIOUS SUBSTRATES;

SUBSTRATES;

EID: 72549113002     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.10.011     Document Type: Article

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