Effects of ZnO buffer layer thickness on properties of ZnO thin films deposited by radio-frequency magnetron sputtering

Applied Surface Science

Volumn 207, Issue 1-4, 2003, Pages 359-364

  Bang, Kyu Hyun ^a   Hwang, Deuk Kyu ^a   Myoung, Jae Min ^a  

^a Yonsei University   (South Korea)

Author keywords

Buffer layer; PL; Rf Magnetron sputtering; Sapphire substrate; SEM; ZnO

Indexed keywords

CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; MAGNETRON SPUTTERING; MORPHOLOGY; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; ZINC OXIDE;

BUFFER LAYERS;

THIN FILMS;

EID: 0037470498     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00005-9     Document Type: Article

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