Controlled synthesis of Zirconium Oxide on graphene nanosheets by atomic layer deposition and its growth mechanism

Carbon

Volumn 52, Issue , 2013, Pages 74-82

  Liu, Jian ^a   Meng, Xiangbo ^b   Hu, Yuhai ^a   Geng, Dongsheng ^a   Banis, Mohammad Norouzi ^a   Cai, Mei ^c   Li, Ruying ^a   Sun, Xueliang ^a  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

^c GENERAL MOTORS CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROLLED SYNTHESIS; CRYSTALLINE PHASE; CRYSTALLINITIES; DEPOSITION TEMPERATURES; DIMETHYLAMIDO; ELECTROCHEMICAL CAPACITANCE; GROWTH MECHANISMS; ISLAND GROWTH; LAYER-BY-LAYER GROWTH; TEMPERATURE RANGE; TETRAKIS; VOLTAMMETRY MEASUREMENTS;

CRYSTALLINE MATERIALS; CYCLIC VOLTAMMETRY; DEPOSITS; GRAPHENE; NANOCOMPOSITES; NANOSHEETS; OXIDES; ZIRCONIA; ZIRCONIUM; ZIRCONIUM ALLOYS;

ATOMIC LAYER DEPOSITION;

EID: 84869489952     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2012.09.007     Document Type: Article

References (63)

1. K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, Y. Zhang, and S.V. Dobonos Electric field effect in atomically thin carbon films Science 306 2004 666 669 (Pubitemid 39440910)
2. A.A. Balandin, S. Ghosh, W. Bao, I. Calizo, D. Teweldebrhan, and F. Miao Superior thermal conductivity of single-layer graphene Nano Lett 8 3 2008 902 907
3. K.I. Nolotin, K.J. Sikes, Z. Jiang, M. Klima, G. Fudenberg, and J. Hone Ultrahigh electron mobility in suspended graphene Solid State Commun 146 2008 351 355
4. M.D. Stoller, S. Park, Y. Zhu, J. An, and R.S. Ruoff Graphene-based ultracapacitors Nano Lett 8 10 2008 3498 3502
5. C. Lee, X. Wei, J.W. Kysar, and J. Hone Measurement of the elastic properties and intrinsic strength of monolayer graphene Science 321 2008 385 388 (Pubitemid 352029970)
6. J. Hass, W.A. Heer, and E.H. Conrad The growth and morphology of epitaxial multilayer graphene J Phys: Condens Matter 20 2008 323202
7. E. Yoo, J. Kim, E. Hosono, H. Zhou, T. Kudo, and I. Honma Large reversible Li storage of graphene nanosheet families for use in rechargeable lithium ion batteries Nano Lett 8 8 2008 2277 2282
8. X. Li, D. Geng, Y. Zhang, X. Meng, R. Li, and X. Sun Superior cycle stability of nitrogen-doped graphene nanosheets as anodes for lithium ion batteries Electrochem Commun 13 8 2011 822 825
9. D. Geng, Y. Chen, Y. Chen, Y. Li, R. Li, and X. Sun High oxygen-reduction activity and durability of nitrogen-doped graphene Energy Environ Sci 4 2011 760 764
10. X. Wang, L. Zhi, N. Tsao, Ž. Tomović, J. Li, and K. Müllen Transparent carbon films as electrodes in organic solar cells Angew Chem Int Ed 47 2008 2990 2992
11. J. Wu, H.A. Becerril, Z. Bao, Z. Liu, Y. Chen, and P. Peumans Organic solar cells with solution-processed graphene transparent electrodes Appl Phys Lett 92 2008 263302
12. Z. Liu, J.T. Robinson, X. Sun, and H. Dai PEGylated nanographene oxide for delivery of water-insoluble cancer drugs J Am Chem Soc 130 33 2008 10876 10877
13. Y. Li, W. Gao, L. Ci, C. Wang, and P.M. Ajayan Catalytic performance of Pt nanoparticles on reduced graphene oxide for methanol electro-oxidation Carbon 48 4 2010 1124 1130
14. S. Guo, S. Dong, and E. Wang Three-dimensional Pt-on-Pd bimetallic nanodendrites supported on graphene nanosheet: facile synthesis and used as an advanced nanoelectrocatalyst for methanol oxidation ACS Nano 4 1 2010 547 555
15. S. Stankovich, D.A. Dikin, G.H.B. Dommett, K.M. Kohlhaas, E.J. Zimney, and E.A. Stach Graphene-based composite materials Nature 442 2006 282 286 (Pubitemid 44114900)
16. 2 nanocomposites: synthesis, characterization and application in hydrogen evolution from water photocatalytic splitting J Mater Chem 20 2010 2801 2806
17. 2-graphene hybrid nanostructures for enhanced Li-ion insertion ACS Nano 3 2009 907 914
18. 2/graphene nanoporous electrodes with three-dimensionally delaminated flexible structure Nano Lett 9 1 2009 72 75
19. D. Wang, R. Kou, D. Choi, Z. Yang, Z. Nie, and J. Li Ternary self-assembly of ordered metal oxide-graphene nanocomposites for electrochemical energy storage ACS Nano 4 3 2010 1587 1595
20. 4 nanocrystals on graphene as a synergistic catalyst for oxygen reduction reaction Nat Mater 10 2011 780 786
21. Y. Huang, J. Liang, and Y. Chen An overview of the applications of graphene-based materials in supercapacitors Small 8 12 2012 1805 1834
22. 2 nanostructured electrodes by conductive wrapping Nano Lett 11 2011 4438 4442
23. 2 nanocomposites for supercapacitors ACS Nano 4 5 2010 2822 2830
24. J. Lu, J.B. Zang, S.X. Shan, H. Huang, and Y.H. Wang Synthesis and characterization of core-shell structural MWNT-zirconia nanocomposites Nano Lett 8 11 2008 4070 4074
25. 2-carbon nanotube nanocomposites Nanotechnology 16 2005 625 630 (Pubitemid 40666561)
26. 2 in acidic media Appl Catal A 364 2009 1 7
27. 2/MWCNT composites as new supports of Pt catalysts for direct methanol fuel cell application Appl Catal B 89 3-4 2009 597 601
28. R. Liang, M. Deng, S. Cui, H. Chen, and J. Qiu Direct electrochemistry and electrocatalysis of myoglobin immobilized on zirconia/multi-walled carbon nanotube nanocomposite Mater Res Bull 45 12 2010 1855 1860
29. A. Javey, H. Kim, M. Brink, Q. Wang, A. Ural, and J. Guo High-k dielectrics for advanced carbon-nanotube transistors and logic gates Nature 1 2002 241 246
30. 2 nanocomposite: preparation, characterization and application for detection of organophosphorus agents J Mater Chem 21 2011 8032 8037
31. J. Gong, X. Miao, H. Wan, and D. Song Facile synthesis of zirconia nanoparticles-decorated graphene hybrid nanosheets for an enzymeless methyl parathion sensor Sens Actuators B 162 1 2012 341 347
32. M. Knez, K. Nielsch, and L. Niinistö Synthesis and surface engineering of complex nanostructures by atomic layer deposition Adv Mater 19 21 2007 3425 3438 (Pubitemid 350134581)
33. X. Meng, D. Geng, J. Liu, R. Li, and X. Sun Controllable synthesis of graphene-based titanium dioxide nanocomposites by atomic layer deposition Nanotechnology 22 2011 165602
34. J.W. Elam, N.P. Dasgupta, and F.B. Prinz ALD for clean energy conversion, utilization, and storage MRS Bull 36 2011 899 906
35. M. Leskelä, M. Ritala, and O. Nilsen Novel materials by atomic layer deposition and molecular layer deposition MRS Bull 36 2011 877 884
36. H.C.M. Knoops, M.E. Donders, M.C.M. van de Sanden, P.H.L. Notten, and W.M.M. Kessels Atomic layer deposition for nanostructured Li-ion batteries J Vac Sci Technol A 30 2012 010801
37. X. Meng, D. Geng, J. Liu, M.N. Banis, Y. Zhang, and R. Li Non-aqueous approach to synthesize amorphous/crystalline metal oxide-graphene nanosheet hybrid composites J Phys Chem C 114 43 2010 18330 18337
38. S.D. Elliott Mechanism, products, and growth rate of atomic layer deposition of noble metals Langmuir 26 12 2010 9179 9182
39. C. Bae, H. Shin, and K. Nielsch Surface modification and fabrication of 3D nanostructures by atomic layer deposition MRS Bull 36 2011 887 897
40. R.L. Puurunen Surface chemistry of atomic layer deposition: a case study for the trimethylaluminum/water process J Appl Phys 97 2005 121301 121352
41. S.M. George Atomic layer deposition: an overview Chem Rev 110 2010 111 131
42. D.M. Hausmann, E. Kim, J. Becker, and R.G. Gordon Atomic layer deposition of hafnium and Zirconium Oxides using metal amide precursors Chem Mater 14 10 2002 4350 4358
43. H.C. Schniepp, J.-L. Li, M.J. McAllister, H. Sai, M. Herrera-Alonso, and D.H. Adamson Functionalized single graphene sheets derived from splitting graphene oxide J Phys Chem B 110 17 2006 8535 8539 (Pubitemid 43798555)
44. W.S. Hummers, and J.R. Offeman Preparation of graphitic oxide J Am Chem Soc 80 6 1958 1339
45. D. Geng, S. Yang, Y. Zhang, J. Yang, J. Liu, and R. Li Nitrogen doping effects on the structure of graphene Appl Surf Sci 257 21 2011 9193 9198
46. S. Stankovich, R.D. Piner, S.T. Nguyen, and R.S. Ruoff Synthesis and exfoliation of isocyanate-treated graphene oxide nanoplatelets Carbon 44 2006 3342 3347 (Pubitemid 44634397)
47. R.L. Puurunen, W. Vandervorst, W.F.A. Besling, O. Richard, H. Bender, and T. Conard Island growth in the atomic layer deposition of Zirconium Oxide and aluminum oxide on hydrogen-terminated silicon: growth mode modeling and transmission electron microscopy J Appl Phys 86 2004 4878 4889
48. M. Copel, M. Gribelyuk, and E. Gusev Structure and stability of ultrathin Zirconium Oxide layer on Si(001) Appl Phys Lett 76 2000 436 438
49. 2 nanolaminates, link between electrical and structural properties J Non-Cryst Solid 303 1 2002 123 133 (Pubitemid 34410835)
50. Y.S. Min, A.H. Lee, Y.H. Lee, and C.S. Hwang Botryoidal growth of crystalline ZnO nanoparticles on a forest of single-walled carbon nanotubes by atomic layer deposition CrystEngComm 13 2011 3451 3454
51. S. Park, and R.S. Ruoff Chemical methods for the production of graphenes Nat Nanotechnol 4 2009 217 224
52. D. Li, M.B. Müller, S. Gilje, R.B. Kaner, and G.G. Wallace Processable aqueous dispersions of graphene nanosheets Nat Nanotechnol 13 2008 101 105 (Pubitemid 351225404)
53. 2 thin films by atomic layer deposition: growth kinetics, structural and electrical properties Appl Surf Sci 193 1-4 2002 120 128 (Pubitemid 34807866)
54. 2 thin films grown by atomic layer deposition J Cryst Growth 148 3 1995 268 275
55. C.H.L. Goodman, and M.V. Pessa Atomic layer epitaxy J Appl Phys 60 1986 R65 R81
56. 2 nanotube arrays of template-directed atomic layer deposition J Mater Chem 21 2011 12321 12330
57. J.C.F. Rodríguez-Reyes, and A.V. Teplyakov Mechanisms of adsorption and decomposition of metal alkylamide precursors for ultrathin film growth J Appl Phys 104 2008 084907
58. D.M. Hausmann, and R.G. Gordon Surface morphology and crystallinity control in the atomic layer deposition (ALD) of hafnium and Zirconium Oxide thin films J Cryst Growth 249 2003 251 261
59. X. Wang, S.M. Tabakman, and H. Dai Atomic layer deposition of metal oxides on pristine and functionalized graphene J Am Chem Soc 130 26 2008 8152 8153 (Pubitemid 351898526)
60. 3 dielectric using ozone-based atomic layer deposition for dual-gated graphene devices Appl Phys Lett 97 2010 043107
61. 3 J Appl Phys 109 2011 124304
62. K.C. Leonard, W.E. Suyama, and M.A. Anderson Evaluating the electrochemical capacitance of surface-charged nanoparticle oxide coatings Langmuir 28 2012 6476 6484
63. M. Nasibi, M.A. Golozar, and G. Rashed Nano Zirconium Oxide/carbon black as a new electrode material for electrochemical double layer capacitors J Power Sources 206 2012 108 110