Characterization of DLC films prepared by plasma-based ion implantation on AISI 321 steel

Vacuum

Volumn 89, Issue 1, 2013, Pages 74-77

  Wang, Yujiang ^a   Ma, Xinxin ^b   Tang, Guangze ^b   Sun, Mingren ^b  

^a NATIONAL KEY LABORATORY FOR REMANUFACTURING   (China)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

DLC films; Implanting voltage; PBII; Raman spectroscopy

Indexed keywords

AFM; ATOMIC FORCE; CARBON SOURCE; DLC FILM; FRICTION COEFFICIENTS; MICRO-PROBES; PBII; PLASMA-BASED ION IMPLANTATION; STEEL SUBSTRATE; WEAR LIFE;

ACETYLENE; CARBON FILMS; ION IMPLANTATION; MECHANICAL PROPERTIES; RAMAN SPECTROSCOPY; SURFACE ROUGHNESS;

FILM PREPARATION;

EID: 84869079620     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.10.015     Document Type: Conference Paper

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