Structure and topographies of diamond-like carbon films produced on tungsten pre-implanted stainless steel substrate by plasma immersion ion implantation and deposition

Diamond and Related Materials

Volumn 16, Issue 8, 2007, Pages 1490-1499

  Xu, Ming ^a,b   Zhao, Jun ^b,c   Cai, Xun ^a   Chen, Qiulong ^a   Chu, Paul K ^b  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^c SOUTHWESTERN INSTITUTE OF PHYSICS   (China)

Author keywords

DLC film; Plasma immersion ion implantation and deposition; Pretreatment; Stainless steel; Tungsten

Indexed keywords

CARBON FILMS; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; ION IMPLANTATION; STAINLESS STEEL; SURFACE TOPOGRAPHY; TUNGSTEN;

PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION; PRETREATMENT PROCEDURES;

DIAMOND LIKE CARBON FILMS;

EID: 34248995504     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.12.028     Document Type: Article

References (28)

1. Robertson J. Surf. Coat. Technol. 50 (1992) 185
2. Grill A. Surf. Coat. Technol. 94-95 (1997) 507
3. Grant D.M., McColl I.R., Golozar M.A., Wood J.V., and Braithwaite N.S.J. Diamond Relat. Mater. 1 (1992) 727
4. Silva S.R.P., Clay K.J., Speakman S.P., and Amaratunga G.A.J. Diamond Relat. Mater. 4 (1995) 977
5. Paterson M.J., Orrman-Rossiter K.G., and Sood D.K. Diamond Relat. Mater. 2 (1993) 1439
6. Huck H., Halac E.B., Oviedo C., Zampieri G., Pregliasco R.G., Alonso E.V., Reinoso M.E., and de Benyacar M.A.R. Appl. Surf. Sci. 141 (1999) 141
7. Druz B., Zaritskiy I., Hoehn J., Polyakov V.I., Rukovishnikov A.I., and Novotny V. Diamond Relat. Mater. 10 (2001) 931
8. Ding X.-z., Zhang F.-m., Liu X.-H., Wang P.W., Durrer W.G., Cheung W.Y., Wong S.P., and Wilson I.H. Thin Solid Films 346 (1999) 82
9. Wang J., Li W.-Z., and Li H.-D. Surf. Coat. Technol. 122 (1999) 273
10. Kumar S., Rauthan C.M.S., Srivatsa K.M.K., Dixit P.N., and Bhattacharyya R. Appl. Surf. Sci. 182 (2001) 326
11. Huang L.-Y., Xu K.-W., Lu J., and Guelorget B. Surf. Coat. Technol. 154 (2002) 232
12. Voevodin A.A., Walck S.D., and Zabinski J.S. Wear 203-204 (1997) 516
13. Jayatissa A.H., Sato F., Saito N., Hirano Y., and Takizawa K. Carbon 38 (2000) 1145
14. Liao J.X., Liu W.M., Xu T., and Xue Q.J. Carbon 42 (2004) 387
15. Walter K.C., Nastasi M., and Munson C. Surf. Coat. Technol. 93 (1997) 287
16. Anders A. Surf. Coat. Technol. 156 (2002) 3
17. Uzumaki E.T., Lamber C.S., and Zavaglia C.A.C. Key Eng. Mater. 254-256 (2004) 435
18. Xu M., Li L.H., Cai X., Liu Y.M., Chen Q.L., and Chu P.K. Diamond Relat. Mater. 15 (2006) 952
19. Xu M., Li L.H., Cai X., Liu Y.M., Chen Q.L., Guo J.X., and Chu P.K. Diamond Relat. Mater. 15 (2006) 1580
20. Zeng Z.M., Zhang T., Tian X.B., Tang B.Y., Kwok T.K., and Chu P.K. Surf. Coat. Technol. 128-129 (2000) 236
21. Chu P.K., Qin S., Chan C., Cheung N.W., and Larson L.A. Mater. Sci. Eng., R Rep. 17 6-7 (1996) 207
22. Chu P.K., Tang B.Y., Wang L.P., Wang X.F., Wang S.Y., and Huang N. Rev. Sci. Instrum. 72 3 (2001) 1660
23. Lee K.-R., Eun K.Y., Kim I., and Kim J. Thin Solid Films 377-378 (2000) 261
24. Chu P.K., and Li L.H. Mater. Chem. Phys. 96 (2006) 253
25. Sattel S., Gieβen T., Roth H., Scheib M., Samlenski R., Brenn R., Ehrhardt H., and Robertson J. Diamond Relat. Mater. 5 (1996) 425
26. Peng X.L., Barber Z.H., and Clyne T.W. Diamond Relat. Mater. 138 (2001) 23
27. Liu D., Zhang S., Ong S.-E., Benstetter G., and Du H. Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process. 426 (2006) 114
28. Kumar A., You Q., Kapat J.S., Mangiaracina A., Catletge A., and Vohra Y. Thin Solid Films 308-309 (1997) 209