Electrical and mechanical properties of DLC coatings modified by plasma immersion ion implantation

Journal of Alloys and Compounds

Volumn 449, Issue 1-2, 2008, Pages 379-383

  Chiu, S M ^a,c   Lee, S C ^b   Wang, C H ^b   Tai, F C ^b   Chu, C W ^c   Gan, Dershin ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c METAL INDUSTRIES RESEARCH AND DEVELOPMENT CENTRE   (Taiwan)

Author keywords

Diamond like carbon; Dielectric constant; Microstructure; Plasma immersion ion implantation

Indexed keywords

ION IMPLANTATION; MICROSTRUCTURE; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; REACTION KINETICS;

DOUBLE BOND; PLASMA IMMERSION; PLASMA IMMERSION ION IMPLANTATION;

DIAMOND LIKE CARBON FILMS;

EID: 36348943504     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2006.02.108     Document Type: Article

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