The effect of H2/C2H2 ratio on the structure and tribological properties of carbon thin films prepared by PBII

Surface and Coatings Technology

Volumn 201, Issue 6, 2006, Pages 2871-2877

  Liao, J X ^a   Tian, Z ^a   Xu, J ^a   Jin, L ^a   Yang, H G ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Carbon thin films; Diamond like carbon; H2 C2H2 ratio; Plasma based ion implantation (PBII); Structure; Tribological properties

Indexed keywords

ATOMIC FORCE MICROSCOPY; ION IMPLANTATION; MORPHOLOGY; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; TRIBOLOGY; WEAR OF MATERIALS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON THIN FILMS; PLASMA-BASED ION IMPLANTATION (PBII); TRIBOLOGICAL PROPERTIES;

DIAMOND LIKE CARBON FILMS;

ATOMIC FORCE MICROSCOPY; DIAMOND LIKE CARBON FILMS; ION IMPLANTATION; MORPHOLOGY; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; TRIBOLOGY; WEAR OF MATERIALS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33751015415     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.05.038     Document Type: Article

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