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Surface and Coatings Technology

Volumn 191, Issue 1, 2005, Pages 90-95

Structures and tribological properties of diamond-like carbon films prepared by plasma-based ion implantation on Si

(7) Liao, J X a Liu, W M b Xu, T b Yang, C R a Chen, H W a Fu, C L a Leng, W J a

a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA (China)

b LANZHOU INSTITUTE OF CHEMICAL PHYSICS (China)

Author keywords

DLC; PBII; Si; Tribological properties

Indexed keywords

CRYSTAL STRUCTURE; ION IMPLANTATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SILICON; TRIBOLOGY; WEAR OF MATERIALS; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM THICKNESS; NANOHARDNESS; RECIPROCATING FREQUENCIES; TRIBOLOGICAL PROPERTIES;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON; ION IMPLANTATION; PLASMA TREATMENT; STRUCTURAL ANALYSIS; TRIBOLOGY;

EID: 10244251682 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.06.039 Document Type: Article

Times cited : (16)

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