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Volumn 14, Issue 1, 2005, Pages 42-47

The effect of negative bias pulse on the bonding configurations and properties of DLC films prepared by PBII with acetylene

(3) Xia, Lifang a Sun, Mengren a Liao, Jiaxun a

a HARBIN INSTITUTE OF TECHNOLOGY (China)

Author keywords

Bonding configurations; Diamond like carbon (DLC); Plasma based ion implantation (PBII); Properties

Indexed keywords

ACETYLENE; BONDING; FILM PREPARATION; ION IMPLANTATION; PHOTOLUMINESCENCE; PLASMA DENSITY; RAMAN SCATTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

BONDING CONFIGURATIONS; DIAMOND-LIKE CARBON (DLC); PLASMA-BASED ION IMPLANTATION (PBII); PROPERTIES;

DIAMOND LIKE CARBON FILMS;

EID: 9744275365 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2004.06.031 Document Type: Article

Times cited : (23)

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