Metal incorporation strategies in DLC (fullerene-like) thin films grown by ECR-CVD

Vacuum

Volumn 85, Issue 12, 2011, Pages 1140-1143

  Pardo, Ainhoa ^a   Gómez Aleixandre, Cristina ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

Coatings; Diamond like carbon (DLC); Electron cyclotron resonance CVD (ECR CVD); Friction coefficient; Metal incorporation; Wear

Indexed keywords

CARBON COATING; CHEMICAL VAPOUR DEPOSITION; CR NANOPARTICLES; DEPOSITION SYSTEMS; DIAMOND LIKE CARBON (DLC); DIAMOND-LIKE CARBON; DLC FILM; ECR-CVD; EX SITU; FRICTION COEFFICIENT; FRICTION COEFFICIENTS; IN-SITU METHODS; LOW FRICTION COEFFICIENTS; METAL INCORPORATION; METAL NANOPARTICLES; NEGATIVE BIAS; PIN-ON-DISC-TESTS; SLIDING DISTANCES; STRUCTURAL CHARACTERIZATION; TRIBOLOGICAL BEHAVIOUR; TRIBOLOGICAL PROPERTIES; WEAR STRENGTH;

CARBON FILMS; CHEMICAL VAPOR DEPOSITION; CHROMATE COATINGS; CHROMIUM; CYCLOTRONS; DISPERSIONS; ELECTRON CYCLOTRON RESONANCE; ETHANOL; FRICTION; FULLERENES; METALS; MOLYBDENUM; NANOCOMPOSITE FILMS; NANOCOMPOSITES; NANOPARTICLES; RAMAN SPECTROSCOPY; RESONANCE; TRIBOLOGY;

DIAMOND LIKE CARBON FILMS;

EID: 79958828759     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.03.001     Document Type: Conference Paper

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