Giant piezoelectricity in PMN-PT thin fi lms: Beyond PZT

MRS Bulletin

Volumn 37, Issue 11, 2012, Pages 1022-1029

  Baek, Seung Hyu ^a   Rzchowski, Mark S ^b   Aksyuk, Vladimir A ^c  

^a Korea Institute of Science and Technology   (South Korea)

^b University of Wisconsin Madison   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DRIVE VOLTAGE; ELECTROSTATIC MEMS; HIGH QUALITY; LARGE DISPLACEMENTS; LOW-VOLTAGE; MECHANICAL ENERGIES; MEMS-STRUCTURE; MICRO-CANTILEVERS; PB(ZR , TI)O; PIEZOELECTRIC LAYERS; PIEZOELECTRIC PROPERTY; PIEZOELECTRIC RESPONSE; PMN-PT SINGLE CRYSTAL; PZT; RELAXOR FERROELECTRIC; SENSITIVE SENSORS;

CHEMICAL SENSORS; CRYSTALLOGRAPHY; ELECTROMECHANICAL DEVICES; ELECTROSTATIC ACTUATORS; EPITAXIAL GROWTH; LEAD; MECHANICAL ACTUATORS; MEMS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; ZIRCONIUM;

PIEZOELECTRICITY;

EID: 84869034250     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs.2012.266     Document Type: Review

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