Cavity optomechanical sensors

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1535-1538

  Miao, H ^a,b   Srinivasan, K ^a   Rakher, M T ^a   Davanco, M ^a,b   Aksyuk, V ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC RINGS; FREQUENCY VIBRATION; FULLY INTEGRATED; HIGH QUALITY FACTORS; HIGH SENSITIVITY; IN-VACUUM; MECHANICAL DISPLACEMENTS; MECHANICAL QUALITY FACTORS; MICRO-MECHANICAL; MICRODISK RESONATORS; NANOSCALE CANTILEVERS; NEAR-FIELD COUPLING; ON CHIPS; OPTICAL EXCITATIONS; OPTO-MECHANICAL SENSORS; OPTOMECHANICAL; THERMAL MOTION;

ACTUATORS; MICROSYSTEMS; NANOCANTILEVERS; OPTOELECTRONIC DEVICES; PHOTOEXCITATION;

SOLID-STATE SENSORS;

EID: 80052105320     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969730     Document Type: Conference Paper

References (7)

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