Design and fabrication of MEMS logic gates

Journal of Micromechanics and Microengineering

Volumn 18, Issue 4, 2008, Pages

  Tsai, Chun Yin ^a   Kuo, Wei Ting ^a   Lin, Chi Bao ^a   Chen, Tsung Lin ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BOOLEAN ALGEBRA; MEMS; SOLID STATE DEVICES; TRANSISTORS;

MEMS LOGIC GATES; MEMS SWITCHES; SOLID-STATE TRANSISTORS;

LOGIC GATES;

EID: 42549105470     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/4/045001     Document Type: Article

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