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Volumn 177, Issue 20, 2012, Pages 1783-1787

Electrical, optical, and structural properties of thin films with tri-layers of AZO/ZnMgO/AZO grown by filtered vacuum arc deposition

(3) Gontijo, Leonardo C a Cunha, Alfredo G b Nascente, Pedro A P c

a INSTITUTO FEDERAL DO ESPÍRITO SANTO (Brazil)

b FEDERAL UNIVERSITY OF ESPÍRITO SANTO (Brazil)

c FEDERAL UNIVERSITY OF SÃO CARLOS (Brazil)

Author keywords

Aluminum doped zinc oxide; Filtered cathodic arc deposition; Heterostructures; Transparent conducting oxide

Indexed keywords

ALUMINUM OXIDE; CONDUCTIVE FILMS; DEPOSITION; GLASS SUBSTRATES; II-VI SEMICONDUCTORS; MAGNESIUM COMPOUNDS; OPTICAL FILMS; PHOTOELECTROCHEMICAL CELLS; SEMICONDUCTOR DOPING; THIN FILM TRANSISTORS; TRANSPARENT CONDUCTING OXIDES; TRANSPARENT ELECTRODES; ZINC OXIDE;

ALUMINUM-DOPED ZINC OXIDE; FILTERED CATHODIC ARC DEPOSITIONS; FILTERED VACUUM ARC DEPOSITION; THIN FILM ELECTRONIC DEVICES; THIN-FILMS; TRANSPARENT CONDUCTING OXIDE; TRANSPARENT CONDUCTIVE OXIDES; TRANSPARENT ELECTRODE; TRANSPARENT THIN FILM TRANSISTOR; TRILAYERS;

THIN FILMS;

EID: 84868207823 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/j.mseb.2012.09.002 Document Type: Article

Times cited : (14)

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