Effects of aluminium doping on zinc oxide transparent thin films grown by filtered vacuum arc deposition

Materials Science and Engineering: B

Volumn 177, Issue 11, 2012, Pages 780-784

  Gontijo, L C ^a   MacHado, R ^b   Nascimento, V P ^c  

^a INSTITUTO FEDERAL DO ESPÍRITO SANTO   (Brazil)

^b FEDERAL UNIVERSITY OF SERGIPE   (Brazil)

^c FEDERAL UNIVERSITY OF ESPÍRITO SANTO   (Brazil)

Author keywords

Thin films; Transparent conductive oxide; Vacuum arc deposition

Indexed keywords

CONDUCTIVE FILMS; DEPOSITION; GLASS SUBSTRATES; II-VI SEMICONDUCTORS; METALLIC FILMS; OPTICAL FILMS; OXIDE FILMS; SEMICONDUCTOR DOPING; VACUUM APPLICATIONS; VACUUM TECHNOLOGY; WORKING PRESSURE; ZINC OXIDE;

ALUMINUM DOPING; ATOMIC CONCENTRATION; DEPOSITION ON GLASS; FILTERED VACUUM ARC DEPOSITION; GLASS SUBSTRATES; THIN-FILMS; TRANSPARENT CONDUCTIVE OXIDES; TRANSPARENT THIN FILM; VACUUM ARC DEPOSITION; ZNO FILMS;

THIN FILMS;

EID: 84861753391     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2012.02.021     Document Type: Article

References (24)

1. R.E. Marotti Thin Solid Films 517 2008 1077
2. K.-M. Lin, and P. Tsai Thin Solid Films 515 2007 8601
3. C.G. Granqvist Solar Energy Materials & Solar Cells 91 2007 1529
4. A. Anders Thin Solid Films 518 12 2010 3313
5. C.G. Granqvist Thin Solid Films 193/194 1990 730
6. R.B.H. Tahar, T. Ban, Y. Ohya, and Y. Takahashi Journal of Applied Physics 83 5 1998 2631
7. H. Rinnert, and M. Vergnat Thin Solid Films 403-404 2002 153
8. K.P. Biju, and M.K. Jain Journal of Crystal Growth 311 8 2009 2542
9. R. Riveros, E. Romero, and G. Gordill Brazilian Journal of Physics 36 3B 2006
10. S. Cornelius Applied Physics Letters 94 2009 042103
11. I.G. Brown Annual Review of Materials Science 28 1998 243
12. S. Goldsmith Surface & Coatings Technology 201 2006 3993
13. X.L. Xu, S.P. Lau, and B.K. Tay Thin Solid Films 398 399 2001 244
14. O. Warschkoww Journal of the American Ceramic Society 89 2 2006 616
15. A. Anders Thin Solid Films 518 2010 3313
16. V.N. Zhitomirsky Thin Solid Films 515 2006 885
17. H.W. Lee, and E.T. All Journal of Crystal Growth 268 2004 596
18. Powder Diffraction File, Data Card 5-644, 3c PDS International Center for Diffraction Data, Swartmore, PA.
19. B.E. Warren X-ray Diffraction 1990 Dover New York, USA p. 253
20. J.I. Langford, and A.J.C. Wilson Journal of Applied Crystallography 11 1978 102 103
21. C. Kittel Introduction to Solid State Physics 3rd ed. 1968 John Wiley and Sons New York
22. F. Urbach Physics Review 92 1953 1324
23. G. Haacke Journal of Applied Physics 47 1976 4086
24. Q.H. Li, D. Zhu, W. Liu, Y. Liu, and X.C. Ma Applied Surface Science 254 2008 2922 2926