Production and characterization of zinc oxide thin films for room temperature ozone sensing

Thin Solid Films

Volumn 418, Issue 1, 2002, Pages 45-50

  Bender, M ^a   Gagaoudakis, E ^a   Douloufakis, E ^a   Natsakou, E ^a   Katsarakis, N ^a   Cimalla, V ^a   Kiriakidis, G ^a   Fortunato, E ^b   Nunes, P ^b   Marques, A ^b   Martins, R ^b  

^a INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

^b DEPARTAMENTO DE CIÊNCIA DOS MATERIAIS   (Portugal)

Author keywords

Magnetron sputtering techniques; Microcrystalline; Polycrystalline undoped zinc oxide; Spray pyrolysis; UV light exposure

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; OZONE; POLYCRYSTALLINE MATERIALS; PYROLYSIS; REDUCTION; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

SPRAY PYROLYSIS;

THIN FILMS;

EID: 0036798291     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00588-6     Document Type: Conference Paper

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