Surface flatness of transparent conducting ZnO:Ga thin films grown by pulsed laser deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 10, 1996, Pages 5457-5461

  Suzuki, Akio ^a   Matsushita, Tatsuhiko ^a   Sakamoto, Yoshiaki ^a   Wada, Naoki ^a   Fukuda, Tomoya ^a   Fujiwara, Hideki ^a   Okuda, Masahiro ^b  

^a OSAKA SANGYO UNIVERSITY   (Japan)

^b Osaka Prefecture University   (Japan)

Author keywords

Liquid crystal transparent electrode; Pulsed laser deposition; Surface flatness; Temperatures of 25 300 c. Transparent conducting oxide films; Zno:ga film

Indexed keywords

ARGON FLUORIDE LASER; LIQUID CRYSTAL TRANSPARENT ELECTRODE; OPTICAL TRANSMITTANCE; PULSED LASER DEPOSITION; SHEET RESISTANCE;

CONDUCTIVE MATERIALS; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; ELECTRODES; GALLIUM; GLASS; PULSED LASER APPLICATIONS; QUARTZ; SURFACE STRUCTURE; ZINC OXIDE;

THIN FILMS;

EID: 0030264027     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.5457     Document Type: Article

References (13)

1. T. Minami, H. Nanto and S. Takata: Jpn. J. Appl. Phys. 24 (1985) L605.
2. Z. C. Jin and C. G. Grannqvist: Appl. Phys. Lett. 51 (1987) 149.
3. T. Minami, H. Sato, S. Takata, N. Ogawa and T. Mouri: Jpn. J. Appl. Phys. 31 (1992) L1106.
4. K. Tominaga, K. Kuroda and O. Tada: Jpn. J. Appl. Phys. 27 (1988) 1176.
5. T. Minami, K. Oohasi and S. Takata: Thin Solid Films 193/194 (1990) 721.
6. R. Konisi, K. Noda and H. Sasakura: Jpn. J. Appl. Phys. 30 (1991) 567.
7. J. Hu and R. G. Gordon: J. Appl. Phys. 71 (1992) 880.
8. Y. Igasaki and H. Saito: J. Appl. Phys. 69 (1991) 2190.
9. R. Solonski and G. J. Collins: Appl. Phys. Lett. 42 (1983) 662.
10. V. Craciun, J. Elders, J. G. E. Gardenies and L. W. Boyd: Appl. Phys Lett. 65 (1994) 2963.
11. A. Suzuki, T. Matsushita, N. Wada, Y. Sakamoto and M. Okuda: Jpn. J. Appl. Phys. 35 (1996) L56.
12. M. Miyazaki, K. Sato, M. Mitsui and H. Nishimura: Ext. Abst. (42nd Spring Meet., 1995) Japan Society of Applied Physics and Related Societies, 29a-E 10 [in Japanese].
13. A. Suzuki, T. Matsushita, N. Wada, Y. Sakamoto and M. Okuda: Sinku 39 (1996) 331.