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Volumn 252, Issue 5, 2005, Pages 1561-1567
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Influence of substrate temperature and post-treatment on the properties of ZnO:Al thin films prepared by pulsed laser deposition
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Author keywords
AZO films; Post deposition annealing; Pulsed laser deposition; Substrate temperature
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Indexed keywords
ALUMINUM;
ANNEALING;
ENERGY GAP;
PULSED LASER DEPOSITION;
ZINC OXIDE;
AZO FILMS;
POST-DEPOSITION ANNEALING;
SUBSTRATE TEMPERATURE;
THIN FILMS;
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EID: 27944448489
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2005.02.137 Document Type: Article |
Times cited : (82)
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References (34)
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