Structure and properties of transparent conductive doped ZnO films by pulsed laser deposition

Applied Surface Science

Volumn 253, Issue 3, 2006, Pages 1522-1527

  Park, Sang Moo ^a   Ikegami, Tomoaki ^a   Ebihara, Kenji ^a   Shin, Paik Kyun ^b  

^a KUMAMOTO UNIVERSITY   (Japan)

^b Inha University   (South Korea)

Author keywords

Electric and optical properties; PLD; TCO; XPS; ZnO

Indexed keywords

CONDUCTIVE FILMS; DOPING (ADDITIVES); PULSED LASER DEPOSITION; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

GLASS SUBSTRATES; OXYGEN PRESSURE; SUBSTRATE TEMPERATURE; TRANSPARENT CONDUCTIVE OXIDE (TCO);

THIN FILMS;

EID: 33750718140     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.02.046     Document Type: Article

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