Structural characterization of ZnO thin films deposited by dc magnetron sputtering

Thin Solid Films

Volumn 515, Issue 24 SPEC. ISS., 2007, Pages 8577-8581

  Kiriakidis, G ^a,b   Suchea, M ^a,b   Christoulakis, S ^a,b   Horvath, P ^a   Kitsopoulos, T ^a,b   Stoemenos, J ^c  

^a INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

^b UNIVERSITY OF CRETE   (Greece)

^c ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

AFM; dc magnetron sputtering; TEM; Thin films; Zinc oxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; ZINC OXIDE;

OXIDATION CONDUCTIVITY; ROOM TEMPERATURE (RT); STRUCTURAL CHARACTERIZATION; STRUCTURAL PARAMETERS;

THIN FILMS;

EID: 34548819618     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.03.111     Document Type: Article

References (9)

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7. Suchea M., Christoulakis S., Moschovis K., Katsarakis N., and Kiriakidis G. Thin Solid Films 515 (2006) 551
8. Horvath P., Kiriakidis G., Nagy P.M., and Christoulakis S. "Mechanical properties and deformation behavior of ZnO thin films under illumination" ((Jan 16-19, 2007)), IEE-NEMS, Bangkok, Thailand
9. I.V. Tudose, P. Horváth, M. Suchea, S. Christoulakis, T. Kitsopoulos, G. Kiriakidis, "Correlation of ZnO Thin Film Surface Properties with conductivity", Appl. Phys. accepted - in press.