Conductivity enhancement by fluorine doping in boron-doped ZnO thin films deposited by the electrospraying method

Journal of Crystal Growth

Volumn 361, Issue 1, 2012, Pages 30-37

  Mahmood, Khalid ^a   Park, Seung Bin ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

A1. Doping; A1. Nanostructures; A2. X ray diffraction; A3. Polycrystalline deposition; B1. Zinc compounds; B2. Semiconducting materials

Indexed keywords

BORON-DOPED; CO-DOPED; CO-DOPED ZNO; CONDUCTIVITY ENHANCEMENT; CRYSTAL PLANES; DOPANT CONCENTRATIONS; DOPED ZNO; ELECTRICAL AND OPTICAL PROPERTIES; ELECTRICAL APPLICATIONS; ELECTROSPRAYING; FLUORINE ATOMS; FLUORINE DOPING; FREE CARRIER CONCENTRATION; GRAIN SIZE; HEATED GLASS SUBSTRATES; HEXAGONAL WURTZITE STRUCTURE; INDIUM TIN OXIDE; LOW RESISTIVITY; MINIMUM VALUE; OPTIMUM CONDITIONS; POLY CRYSTALLINE DEPOSITION; POLYCRYSTALLINE; PREFERENTIAL ORIENTATION; PRESENT VALUE; RESISTIVITY VALUES; SCANNING ELECTRON MICROGRAPHS; SEMICONDUCTING MATERIALS; STARTING SOLUTIONS; VISIBLE RANGE; VISIBLE REGION; X-RAY DIFFRACTION STUDIES; X-RAY ENERGIES; XRD PATTERNS; ZNO; ZNO THIN FILM;

CRYSTAL ORIENTATION; DEPOSITS; ELECTRIC PROPERTIES; FLUORINE; INDIUM COMPOUNDS; METALLIC FILMS; OPACITY; OPTICAL FILMS; SCANNING ELECTRON MICROSCOPY; TIN; TIN OXIDES; X RAY DIFFRACTION; ZINC COMPOUNDS; ZINC OXIDE; ZINC SULFIDE;

SEMICONDUCTOR DOPING;

EID: 84866689101     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2012.08.018     Document Type: Article

References (54)

1. H. Ohta, and H. Hosono Materials Today 6 2004 42 51
2. Z.Q. Xu, H. Deng, Y. Li, Q.H. Guo, and Y.R. Li Materials Research Bulletin 41 2006 354
3. J.H. Lee, and B.Ok. Park Thin Solid Films 426 2003 94
4. X. Wu, T.J. Coutts, and P.W. Mulligan Journal of Vacuum Science and Technology A 15 1997 1057
5. G.B. Palmer, K.R. Poeppelmeier, and T.O. Mason Chemistry of Materials 9 1997 3121
6. Y. Jin, J. Wang, B. Sun, J.C. Blakesley, and N.C. Greenham Nano Letters 8 2008 1649
7. C. Soci, A. Zhang, B. Xiang, S.A. Dayeh, D.P.R. Aplin, J. Park, X.Y. Bao, Y.H. Lo, and D. Wang Nano Letters 7 2007 1003
8. H. Kind, H.Q. Yan, M. Law, and P.D. Yang Advanced Materials 14 2002 158
9. A.F. Aktaruzzaman, G.L. Sharma, and L.K. Malhotra Thin Solid Films 198 1991 67
10. S. Kohiki, M. Nishitani, and T. Wada Journal of Applied Physics 75 1994 2069
11. K. Mahmood, D.S. Song, and S.B. Park Surface and Coatings Technology 206 2012 4730 4740
12. J. Hu, and R.G. Gordon Journal of Applied Physics 72 1992 5381
13. J. Hu, and R.G. Gordon Solar Cell 30 1991 437
14. W.W. Wenas, A. Yamad, K. Takahashi, M. Yoshino, and M. Konagai Journal of Applied Physics 70 1991 7119
15. S. Tirado-Guerra, M. Olvera de la, A. Maldonado, and L. Castaneda Solar Energy Materials and Solar Cells 90 2006 2346
16. B.N. Pawar, D.H. Ham, R.S. Mane, T. Ganesh, B.W. Cho, and S.H. Han Applied Surface Science 254 2008 6294
17. J. Rousset, E. Saucedo, and D. Linco Chemistry of Materials 21 2009 534
18. M. Mapa, and C.S. Gopinath Chemistry of Materials 21 2009 351
19. J.J. Robbins, J. Harvey, J. Leaf, C. Fry, and C.A Wolden Thin Solid Films 473 2005 35
20. F.K. Shan, B.C. Shin, S.W. Jang, and Y.S. Yu Journal of the European Ceramic Society 24 2004 1015
21. F. Chaabouni, M. Abaab, and B. Rezig Materials Science and Engineering B 109 2004 236
22. F.D. Paraguay, M. Miki-Yoshida, J. Morales, J. Solis, and W.L. Estrada Thin Solid Films 373 2000 137
23. H.-W. Ryu, B.-S. Park, S.A. Akbar, W.-S. Lee, K.-J. Hong, Y.J. Seo, D.-C. Shin, J.-S. Park, and G.-P. Choi Sensors and Actuators B 96 2003 717
24. G. Sberveglieri, S. Groppelli, P. Nelli, A. Tintinelli, and G. Giunta Sensors and Actuators B 25 1995 588
25. J. Li, H.Q. Fan, X.H. Jia, J. Chen, Z.Y. Cao, and X.P. Chen Journal of Alloys and Compounds 481 2009 735 739
26. Powder Diffraction Files, Joint Committee on Powder Diffraction Standards, ASTM, Philadelphia, PA, 1967 Card 36-1451.
27. Y.M. Lu, W.S. Hwang, W.Y. Liu, and J.S. Yang Materials Chemistry and Physics 72 2001 269
28. J.H. Lee, K.H. Ko, and B.O. Park Journal of Crystal Growth 247 2003 119
29. 〈http://en.wikipedia.org/wiki/Ionic radius〉, 2012.
30. K.C. Park, D.Y. Ma, and K.H. Kim Thin Solid Films 305 1997 201 209
31. R. Brenier, and L. Ortega Journal of Sol-gel Science and Technology 29 2004 137
32. X.B. Wang, C. Song, K.W. Geng, F. Zeng, and F. Pan Journal of physics D - Applied physics 39 2006 4992
33. P. Nunes, E. Fortunato, P. Tonello, F.B. Fernandes, P. Vilarinho, and R. Martins Vacuum 64 2002 281
34. A. El Manounia, F.J. Manjónb, M. Mollar, B. Maríb, R. Gómez, M.C. López, and J.R. Ramos-Barradod Superlattices and Microstructures 39 2006 185 192
35. H.M. Zhou, D.Q. Yi, Z.M. Yu, L.R. Xiao, and J. Li Thin Solid Films 515 2007 6909 6914
36. G.H. Kim, J.G. Bang, Y.S. Kim, S.K. Rout, and S.I. Woo Applied Physics A 97 2009 821
37. G.H. Kim, D.H. Hwang, and S.I. Woo Materials Chemistry and Physics 131 2011 77 83
38. C. Barret, and T.B. Massalki Structure of Metals 1980 Pergamon Oxford p. 204
39. David R. Lide Handbook of Chemistry and Physics 67th ed. 1986/1987 CNRS Paris p. 171
40. B. Joseph, P.K. Manoj, and V.K. Vaidyan Ceramics International 32 2006 487 493
41. E. Bursten Physical Review 93 1954 632
42. L. Gao, Y. Zhang, J.M. Zhang, and K.W. Xu Applied Surface Science 257 2011 2498 2502
43. F. Cao, Y.D. Wang, J.Z. Jin, M.L. Cong, and L.Y. Han Chinese Physics Letters 11 2009 114203
44. E.M. Bachari, G. Baud, S.B. Amor, and M. Jacquet Thin Solid Films 348 1999 165
45. G.B. Palmer, and K.R. Poeppelmeier Chemistry of Materials 9 1997 3121
46. M. Suchea, S. Christoulakis, N. Katsarakis, T. Kitsopoulos, and G. Kiriakidis Thin Solid Films 515 2007 6562
47. R.E. Marotti, P. Giorgi, G. MacHado, and E.A. Dalchiele Solar Energy Materials and Solar Cells 90 2006 2356
48. H.P. He, F. Zhuge, Z.Z. Ye, L.P. Zhu, F.Z. Wang, B.H. Zhao, and J.Y. Huang Journal of Applied Physics 99 2006 023503
49. S.S. Lin, and J.L. Huang Surface and Coatings Technology 185 2004 222
50. T. Minami Semiconductor Science and Technology 20 2005 S35
51. C.M. Muiva, T.S. Sathiaraj, and K. Maabong Ceramics International 37 2011 555 560
52. S.M. Kim, Y.S. Rim, M.J. Keum, and K.H. Kim Journal of Electroceramics 23 2009 341 345
53. T. Minami, H. Nanto, and S. Takata Japanese Journal of Applied Physics 23 1984 280
54. A. Suzuki, T. Matsushita, N. Wada, Y. Sakamoto, and M. Okuda Japanese Journal of Applied Physics 35 1999 56