Effect of the substrate temperature on the properties of ZnO films grown by RF magnetron sputtering

Materials Science and Engineering: B

Volumn 109, Issue 1-3, 2004, Pages 236-240

  Chaabouni, F ^a   Abaab, M ^a   Rezig, B ^a  

^a UNIVERSITY OF TUNIS EL MANAR   (Tunisia)

Author keywords

Electrical measurements; Sputtering; Thin films; Zinc oxide

Indexed keywords

CHARGE TRANSFER; CONDUCTIVE FILMS; CRYSTAL ORIENTATION; DEPOSITION; GRAIN BOUNDARIES; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; MICROSTRUCTURE; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SOL-GELS; THERMAL EFFECTS; THIN FILMS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

BAND GAP; RF MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE; TRANSPARENT AND CONDUCTIVE (TCO) FILMS;

FILM GROWTH;

EID: 2342488093     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2003.10.105     Document Type: Conference Paper

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