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Journal of Electroceramics

Volumn 23, Issue 2-4, 2009, Pages 341-345

Study on the electrical and optical properties of ITO and AZO thin film by oxygen gas flow rate

(4) Kim, Sang Mo a Rim, You Seung a Keum, Min Jong b Kim, Kyung Hwan a

a Gachon University (South Korea)

b Center for Advanced Plasma Surface Technology (South Korea)

Author keywords

AZO; FTS; ITO; TCO

Indexed keywords

AL-DOPED ZINC OXIDE; AR ATOM; AS-DEPOSITED THIN FILMS; AZO THIN FILMS; ELECTRICAL AND OPTICAL PROPERTIES; ENERGETIC PARTICLES; FACING TARGETS SPUTTERING; GLASS SUBSTRATES; INDIUM OXIDE; INPUT POWER; OPTICAL TRANSMITTANCE; OXYGEN GAS FLOW; ROOM TEMPERATURE; STRUCTURAL AND OPTICAL PROPERTIES; TIN DOPED INDIUM OXIDE; TRANSPARENT CONDUCTIVE OXIDES; TRANSPARENT ELECTRODE; VISIBLE RANGE;

AERODYNAMICS; CONDUCTIVE FILMS; ELECTRIC PROPERTIES; FLOW OF GASES; INDIUM; ITO GLASS; OPTICAL PROPERTIES; OXIDE FILMS; OXYGEN; PLASMAS; SPACECRAFT INSTRUMENTS; THIN FILM DEVICES; THIN FILMS; TIN; TITANIUM COMPOUNDS; VAPOR DEPOSITION; ZINC; ZINC OXIDE;

DEPOSITION;

EID: 73449089483 PISSN: 13853449 EISSN: 15738663 Source Type: Journal
DOI: 10.1007/s10832-008-9452-z Document Type: Article

Times cited : (28)

References (14)

1
- 0024067942
- 10.1016/0169-4332(88)90400-X
- Y. Igasaki M. Ishikawa G. Shimaoka 1988 Appl. Surf. Sci. 33/34 926 933 10.1016/0169-4332(88)90400-X
- (1988) Appl. Surf. Sci. , vol.3334 , pp. 926-933
- Igasaki, Y.¹ Ishikawa, M.² Shimaoka, G.³

2
- 0032628037
- 10.1016/S0040-6090(98)01556-9 1999TSF.341.152C
- K.H. Choia J.Y. Kima Y.S. Leeb H.J. Kima 1999 Thin Solid Films 341 152 155 10.1016/S0040-6090(98)01556-9 1999TSF...341..152C
- (1999) Thin Solid Films , vol.341 , pp. 152-155
- Choia, K.H.¹ Kima, J.Y.² Leeb, Y.S.³ Kima, H.J.⁴

3
- 33846242214
- Design of ZnO/Ag/ZnO multilayer transparent conductive films
- DOI 10.1016/j.mseb.2006.03.003, PII S0921510706001565
- D.R. Sahu J.-L. Huang 2006 Mater. Sci. Eng. B 130 295 299 10.1016/j.mseb.2006.03.003 1:CAS:528:DC%2BD28XlsVegt7w%3D (Pubitemid 46107056)
- (2006) Materials Science and Engineering B: Solid-State Materials for Advanced Technology , vol.130 , Issue.1-3 , pp. 295-299
- Sahu, D.R.¹ Huang, J.-L.²

4
- 33747162204
- ZnO/Ag/ZnO multilayer films for the application of a very low resistance transparent electrode
- DOI 10.1016/j.apsusc.2005.09.021, PII S0169433205012857
- D.R. Sahu S.-Y. Lin J.-L. Huang 2006 Appl. Surf. Sci. 252 7509 7514 10.1016/j.apsusc.2005.09.021 1:CAS:528:DC%2BD28XotlWiu7c%3D 2006ApSS..252.7509S (Pubitemid 44233931)
- (2006) Applied Surface Science , vol.252 , Issue.20 , pp. 7509-7514
- Sahu, D.R.¹ Lin, S.-Y.² Huang, J.-L.³

5
- 0028491208
- 10.1063/1.357665 1:CAS:528:DyaK2cXlvFSju7w%3D 1994JAP.76.1992T
- A. Tiburcio-Silver J.C. Joubert M. Labeau 1994 J. Appl. Phys. 76 1992 10.1063/1.357665 1:CAS:528:DyaK2cXlvFSju7w%3D 1994JAP....76.1992T
- (1994) J. Appl. Phys. , vol.76 , pp. 1992
- Tiburcio-Silver, A.¹ Joubert, J.C.² Labeau, M.³

6
- 0034299914
- Structural, optical and electrical studies on spray deposited highly oriented ZnO films
- DOI 10.1016/S0169-4332(00)00533-X
- B.J. Lokhande M.D. Uplane 2000 Appl. Surf. Sci. 167 243 10.1016/S0169-4332(00)00533-X 1:CAS:528:DC%2BD3cXmtlGmu7w%3D 2000ApSS..167..243L (Pubitemid 30930600)
- (2000) Applied Surface Science , vol.167 , Issue.3 , pp. 243-246
- Lokhande, B.J.¹ Uplane, M.D.²

7
- 0009831788
- 10.1063/1.362887 1:CAS:528:DyaK28XktlKitLk%3D 1996JAP.80.787H
- S. Hayamizu H. Tamaka T. Kawai 1996 J. Appl. Phys. 80 787 10.1063/1.362887 1:CAS:528:DyaK28XktlKitLk%3D 1996JAP....80..787H
- (1996) J. Appl. Phys. , vol.80 , pp. 787
- Hayamizu, S.¹ Tamaka, H.² Kawai, T.³

8
- 0031072758
- 10.1016/S0040-6090(96)09157-2 1997TSF.295.104N
- K.L. Narasimahar S.P. Pai V.R. Palkar P. Pinto 1997 Thin Solid Films 295 104 10.1016/S0040-6090(96)09157-2 1997TSF...295..104N
- (1997) Thin Solid Films , vol.295 , pp. 104
- Narasimahar, K.L.¹ Pai, S.P.² Palkar, V.R.³ Pinto, P.⁴

9
- 36449007170
- 10.1063/1.349794 1:CAS:528:DyaK38XksVSqsg%3D%3D 1991JAP.70.7119W
- W.W. Wenas A. Yamada K. Takahashi M. Yoshino M. Konagai 1991 J. Appl. Phys. 70 7119 10.1063/1.349794 1:CAS:528:DyaK38XksVSqsg%3D%3D 1991JAP....70.7119W
- (1991) J. Appl. Phys. , vol.70 , pp. 7119
- Wenas, W.W.¹ Yamada, A.² Takahashi, K.³ Yoshino, M.⁴ Konagai, M.⁵

10
- 0001649163
- 10.1063/1.352231 1:CAS:528:DyaK3sXjtVOnsg%3D%3D 1992JAP.72.4203N
- Y. Natsume H. Sakata T. Hirayama 1992 J. Appl. Phys. 72 4203 10.1063/1.352231 1:CAS:528:DyaK3sXjtVOnsg%3D%3D 1992JAP....72.4203N
- (1992) J. Appl. Phys. , vol.72 , pp. 4203
- Natsume, Y.¹ Sakata, H.² Hirayama, T.³

11
- 0034274268
- Zinc oxide films prepared by sol-gel spin-coating
- DOI 10.1016/S0040-6090(00)01056-7
- Y. Natsume H. Sakata 2000 Thin Solid Films 372 30 10.1016/S0040-6090(00) 01056-7 1:CAS:528:DC%2BD3cXlvV2iurs%3D 2000TSF...372...30N (Pubitemid 30902527)
- (2000) Thin Solid Films , vol.372 , Issue.1 , pp. 30-36
- Natsume, Y.¹ Sakata, H.²

12
- 0031162080
- 10.1063/1.365556 1:CAS:528:DyaK2sXjvFCmsb0%3D 1997JAP.81.7764K
- K.H. Kim K.C. Park D.Y. Ma 1997 J. Appl. Phys. 81 7764 10.1063/1.365556 1:CAS:528:DyaK2sXjvFCmsb0%3D 1997JAP....81.7764K
- (1997) J. Appl. Phys. , vol.81 , pp. 7764
- Kim, K.H.¹ Park, K.C.² Ma, D.Y.³

13
- 0030192126
- 10.1088/0022-3727/29/7/022 1:CAS:528:DyaK28XksFCmu78%3D 1996JPhD.29.1873B
- S. Bose S. Ray A.K. Barua 1996 J. Phys. D: Appl. 29 1873 10.1088/0022-3727/29/7/022 1:CAS:528:DyaK28XksFCmu78%3D 1996JPhD...29.1873B
- (1996) J. Phys. D: Appl. , vol.29 , pp. 1873
- Bose, S.¹ Ray, S.² Barua, A.K.³

14
- 0033900437
- Influence of oxygen partial pressure on transparency and conductivity of RF sputtered Al-doped ZnO thin films
- DOI 10.1016/S0169-4332(99)00517-6
- T. Tsuji M. Hirohashi 2000 Appl. Surf. Sci. 157 410 10.1016/S0169- 4332(99)00517-6 (Pubitemid 30565696)
- (2000) Applied Surface Science , vol.157 , Issue.1 , pp. 47-51
- Tsuji, T.¹ Hirohashi, M.²

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